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562 Series ULTRAlign™ Precision Multi-Axis Positioning Stages

562 Series ULTRAlign™ Precision Multi-Axis Positioning Stages
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562 Series ULTRAlign™ Precision Multi-Axis Positioning Stages - 1

875 Email: sales@newport.com • Web: newport.com M a n u a l P o s i t i o n i n g MANUAL ROTATION AND TILT STAGES MANUAL LINEAR STAGES MANUAL ACTUATORS MANUAL FIBER ALIGNMENT 562 Series ULTRAlign™ Precision Multi-Axis Positioning Stages Model 562-XYZ with SM-13 micrometers (Order micrometers separately) 562 Series ULTRAlign™ Linear Stages feature stainless steel construction for superior long-term stability, with thermally matched, hardened steel crossed-roller bearings for unsurpassed performance. The crossed-roller bearings and precision-manufactured bearing reference surfaces provide exceptionally linear travel, with angular deviation better than 100 ìrad about any axis. We measure each stage on a six-axis interferometer to ensure performance. Each 562 stage axis is equipped with a non-influencing locking mechanism to maintain sub-micron positioning when locking or unlocking. Specially designed actuator mounting blocks allow quick and easy actuator changes, on any axis, at any time. Both right and left-handed stages are available for ergonomic actuator placement. And a choice of manual or motorized actuators is available to build a system that meets your specific resolution requirements. • Stainless steel construction for the ultimate long-term stability • Hardened steel, crossed-roller bearings for high rigidity and precision motion • Angular deviation better than 100 ìrad about any axis – guaranteed • Compatible with Newport manual and motorized actuators • Left and right-handed configurations Preloaded crossed-roller bearings provide repeatable, zero stick-slip linear motion with negligible side-play. The roller strips hold cylindrical rollers alternately inclined 90° to assure constant linear contact with the hardened and Specifications ground ways. Maximum Travel X, Z axis [in. (mm)] 0.5 (13) Maximum Travel Y axis [in. (mm)] 0.5 (13) Angular Deviation (ìrad) <100 Load Capacity [lb (N)] 35 (156) Optical Axis Height [in. (mm)] 3.875 (98.4) Ordering Information Model (Metric) Actuators Required* 562-XYZ (M-562-XYZ) 3 562-XYZ-LH (M-562-XYZ-LH) 3 * Actuators must be ordered separately Left-handed versions contain “-LH” in the model number For Vacuum Compatible versions please contact Newport directly. Please see page 631, Vacuum Compatibility for specifics. Availability – Guaranteed on select items @ newport.com

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562 Series ULTRAlign™ Precision Multi-Axis Positioning Stages - 2

876 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M a n u a l P o s i t i o n i n g MANUAL ROTATION AND TILT STAGES MANUAL FIBER ALIGNMENT MANUAL ACTUATORS MANUAL LINEAR STAGES Recommended Actuators Manual Drives Description Travel (mm) Sensitivity (ìm) AJS Series Fine Adjustment Screw 6–13 0.6–0.6 - 0.75 SM-13 Micrometer 13 1 HR-13 High-Resolution Micrometer 13 0.5 DM-13 Differential Micrometer 13 0.1 DM-13L Differential Micrometer 13 0.1 Motorized Drives LTA-HS Motorized Actuator 50 0.1 CMA Series Motorized Actuator 12.5 0.2–0.5 PZA12 Actuator NanoPZ actuator, 12.5 mm travel 12.5 0.03...

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