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03.2010 mechOncs.com Micro Positioning Systems with Piezo Inertial Drives Miniature translation stage MS 30 o Piezo inertial drive with lowest hystrsis o Reached position will be held without current o Long lifetime o Variable step width -open loop about 200 nm -closed loop about 50 nm o High pushing or blocking force o No limit switches necessary o Ultra compact dimensions possible o Customized solutions as -ultra high vacuum uses -ultra low temprature uses -ultracompact drives o Compact hand-held controller with |Bj{ft^ -battery- or power supply opration IJ^^^-RS232 interface LXj o Compact USB controller with I ] -USB voltage op驩ration H| -USB - Interface L^CT Miniature translation stage MS 30: prparation (or vacuum witti llnear measuhng System MnnamDde Coupler MK Compact XYZ-positioner MX 25 Hand-held contrler CN :)u mechOnics ag Unn鴹tzstr. 2/B 81825 Munich info@mechonics.de www.mechonics.de Fon +49 (0) 89/4202 4207 Fax +49 (0) 89/4202 4206

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0) 89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Page 1. Manual positioners with fine pitch screw 1.1 Miniature Positioning Stage HS 30 2 2. Linear positioning systems with piezo inertial drives 2.1 Linear positioners for one dimension (open design) 2.1.1 Miniature Positioning Stage MS 15 4 2.1.2 Miniature Positioning Stage MS 30 6 2.1.3 Miniature Positioning Stage MS 38 with free aperture 8 2.2 Linear positioners for one dimension (closed design) 2.2.1...

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series HS HS 30, 8 mm travel HS 30, 18 and 30 mm travel Travel A B C D 18 40 33.2 10.5 15.5 30 52 45.2 16.5 21.5

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series MS MS 15 Ultra small Miniature Translation Stages with piezo electric inertial drive Application Examples Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R & D Miniature Translation Part no. Stage MS 15 MS.015.04 0 6 9 Vacuum no 10-6 10-9 0 2 3 Mounting x xy xyz (not removable) Specifications Piezo driven step motor with low hysteresis holds reached position without current step...

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series MS MS 15, 3.5 mm travel Dimensions for xy – combination (not removable) Dimensions for xyz – combination (xy – combination not removable) 7,0 8 x M1 8 x M1 1,5 7,5 13,5 15,0 1,5 7,5 13,5 15,0 1,5 7,5 13,5 15,0 1,5 7,5 13,5

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series MS MS 30 Miniature Translation Stages with piezo electric inertial drive Application Examples Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R & D Miniature Translation Part no. Stage MS 30 MS.030. 08 18 30 Travel 8 mm 18 mm 30 mm 0 6 9 Vacuum no 10-6 10-9 0 1 Measuring- without with (please specify with sensor) system Specifications Piezo driven step motor with low hysteresis...

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series MS MS 38 Miniature Translation Stages with free opening dia 10 mm and piezo electric inertial drive Application Examples .. Micro-/Nano Technology .. Bio Technology .. Microscopy .. Quality Control .. Metrology .. R & D Miniature Translation Part no. Stage MS 38 MS.038.08..0 0 6 9 Vacuum no 10-6 10-9 Specifications .. Piezo driven step motor with low hysteresis .. holds reached position without current .....

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series DS DS 30, 8 mm travel Front view: Top view: Rear view:

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series DS DS 40, 11 mm travel Front view: Top view: Rear view:

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0) 89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series MX MX 25 with 2 mm travel in xyz-direction MX 25/35 Miniature XYZ Positioners with piezo electric inertial drive Application Examples Micro-/Nano Technology Bio Technology Microscopy Quality Control Metrology R & D Miniature XYZ Positioner Part no. MX.0 5.1 0 2 3 Type MX 25 MX 35 0 x Top plate Standard custom design design 0 6 9 Vacuum no 10-6 10-9 Specifications Piezo driven step motor with low hysteresis...

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0) 89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series MK MK 25 Miniature Monomode Coupler MK 25 with piezo electric inertial motor Application Examples Micro-/Nano Technology Bio Technology Microscopy Telecommunication Metrology R & D Miniature Monomode- Part no. Coupler MK 25 MK.025.1 0 1 Coupler type FC SMA 0 6 x Vacuum no 10-6 customized A B x Numerical 0.40 0.38 customized aperture Specifications Piezo driven step motor with low hysteresis holds reached...

mechOnics ag Unnützstr. 2B 81825 Munich Fon +49 (0) 89/4202 4207 Fax +49 (0)89/4202 4206 www.mechOnics.de Micropositioners Positionsensors Motor Controllers Customized Items Index Series NDS NDS 40 Miniature Translation Stages with piezo electric inertial drive for NOVA system Application Examples „« Micro-/Nano Technology „« Bio Technology „« Microscopy „« Quality Control „« Metrology „« R & D Miniature Translation Part no. Stage NDS 40 NOVA NDS.040.11..0 0 6 9 Vacuum no 10-6 10-9 Remarks: Vacuum application is possible only without electrical circuit. You need the electronic module NDEM 3...