Intro 03 10/13/03 2:30 PM Page 1 VACUUM PRODUCTS CORPORATION ...from One SourceDedicatedto Quality and Service >

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Double Sided Access > 2 NPT TAPPED HOLES PG 284 PG 284 PG 285 > MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817 9 >

Bourdon Gauges Thermocouple Ion Gauges Section 2Contents002944e > PG 290 PG 291 PG 295 Viewports Shutters Glass Components Section 2Contents002944e > Section 5Section 4 PG 306 PG 311 PG 313 Quick-Access Doors > QUICK-ACCESS DOORS ARE FOUND IN SECTION 7 PG 439 10 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation size="-2">

Coaxial Medium Current High Current > Section 6 Section 3Contents > High Voltage RFPower Breaks &Envelopes > PG 337 PG 341 PG 343 Multipin Power Instrumentation Type-D Multipin > PG 345 PG 347 PG 349 In-Vacuum General Liquid Liquid Nitrogen > PG 353 PG 359 PG 363 MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817 11 size="-1">

Rotary Linear Heavy Duty Linear Section 2Contents002944e > PG 379 PG 387 PG 398 Rotary-Linear Precision Rotary-Linear > PG 403 PG 404 PG 406 Wobble Stick with Pincer XYStages > PG 407 PG 409 PG 417 Z Stages Compact ZStages XYZStages > CONTINUED ON NEXT PAGE... PG 419 PG 423 PG 427 12 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation size="-2">

Section 7 ...CONTINUED FROM PREVIOUS PAGE PG 433 PG 437 PG 439 > PG 458 PG 462 PG 464 > MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817 13 >

Resistive Sources Electron Beam Ion Gauges Power SuppliesՕProgrammable XYSweepersDeposition RateControllersՕCrucible Liners Accessories Section 2Contents002944e > Section 8Section 9 Bell Jars Feedthrough Collars Baseplates &Wells Section 2Contents002944e > PG 475 PG 477 PG 479 Surface Science > PG 483 14 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation size="-3">

7.3MotorizationSpecifications458 In-Vacuum Stepper Motors462 Motor Controls464 > Thin Film Deposition For all e-Vap > Thin Film Deposition products,please visit our website: www.mdcvacuum.com > e-Vap > ή Electron Beam SourceRe-Vap > Resistive Heater SourceHorizontal Source Assembly Vertical Source Assembly e-Vap > ή Power Supplye-Vap > Controls &MeasurementSource Controller ProgrammableSweep Controller Multilayer Deposition Controller > Evaporation Source Accessories Chambers 9.1Stainless Steel Bell Jars4749.2Feedthrough Collars476 > Baseplates &Base Wells478 9.3Surface Science Analysis Chambers480...

Metal Seal CF Introduction24 Del-Seal > CF Flanges28 Del-Seal > ٙ CF Fittings62 Wire Seal Flanges76 > Section 1Contents Elastomer Seal ISO Introduction78 ISOKFKwik-Flange > 86 ISOLFLarge-Flange > ٙ 94 ISOKFKwik-Flange > Fittings112 ISOLFLarge-Flange > ٙ Fittings112 ANSIASAFlanges130 Weldable Components Tubing132 Formed &Welded Bellows136 Fittings138 Quick-Disconnect Fittings146 Hybrid Adapters Introduction148 Flange to Flange150 Fitting to Flange154 > 23 size="-2">

MDC established its standing in the vacuumcomponents world after becoming one of the first licensed manufacturers of Varianْs patented Conflat CFflange with a previously used metal gasket and strongly recommends the installation of a new metal gasket every time a flange is fastened.When flange fasteners are tightened to their specified sealing torques a gap will remain between the mating flanges, this is normal and desirable.Tightening the flanges metal-to-metal is not necessary to achieve a UHV hermetic seal.OFE copper,which stands for ٓOxygen FreeElectronic or Electrolytic grade Copper,is the...

Flanges &Fittings Del-Seal ٙ CF metal seal flange Material Flanges304ssGasketsOFE Copper or Viton > elastomer Bolts300ss and silver plated Bolt head typeHexagonal,socket or 12-point headNut TypeHexagonal or two hole plate nutsBolt SizeFractional SizeTorque .160-32 UNC8-327 lb-ft.250-28 UNF1/4-2812 lb-ft.312-24 UNF5/16-2415 lb-ft.375-24 UNF3/8-2426 lb-ft.500-20 UNF1/2-2033 lb-ft.625-18 UNF5/8-1833 lb-ft Alternate material 18-8 SS bolts are supplied Fastening > 2-3/4" Del-Seal Ι CFflange Elastomer seal,all sizes7-10 lb-ft Vacuum Range > Two places Del-Seal > CF or Wire Seal1x10 > -13 Torr Elastomer...

Flanges & Fittings Flanges &Fittings Wire Seal OFE Copper-seal flangespage 76 > Del-Seal > ٙ CF double sided flangespage 56 SetbackThrough boreTube counterbore Knife edgeGasket capture groove Bolt hole > Hybrid adapterspage 148 Flange thicknessBolt circle - BC Flange diameter > Rotatable Flange Example Del-Seal > ٙ CF fittingspage 62 >

ЕThrough hole flanges have 6 bolt holes drilled .172" diameterTapped flanges have 6 bolt holes threaded 8-32 ՕWeld preps shown for small diameter,thin wall tube sizes > See page 26for elastomer specifications