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Sensor module
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MCQ Sensor Module Digital Mass Flow Meter and Controller Rev. March 2010 V 1.0 (Preliminary)

The sensor module can be used both for the measure and for the control of gas mass flow. It has been conceived for all the customers that want to realize applications where control of gas flow rate is required. The sensor module allows to develop a mass flow controller that meets their own requirements. The module is based on an airflow sensor that senses mass flow rate and flow direction from the heat transfer that it creates across the surface of a resistor bridge heater circuit. The board mounts an operational amplifier, an analog filter and a DSP microcontroller that realizes the data...

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MCQ Sensor Module Digital Mass Flow Meter and Controller PERFORMANCE SPECIFICATION Accuracy 10 - 100% FS 1% of set point < 10% FS 0,2% of FS Operation Pressure Repeatability 0,16% of reading Max 25 psi Working Temperature 0 - 50° C Power Supply Regulated 3.3V for digital and 10V for analog DC Response Time Sensor: 4 ms Controller: 50 ms OPERATING SPECIFICATION Gases All non-aggressive gases Input channel 1 Digital Input I2C BUS Output Channel 1 PWM channel for actuator control 2 programmable output analog channels: 0 - 5V, Max 80mA UART 115.200 BPS N2, 20°C, 101.325 kPa (1 atm)...

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MCQ Sensor Module Digital Mass Flow Meter and Controller Description: The sensor module can measure flows as low as 0.058sccm, with a sampling rate up to 20Hz. The module detects the gas mass flow through the measure of heat transfer. In presence of gas flow the upstream and downstream distribution is disturbed and the induced asymmetry is measured. To obtain a measure of the gas flow, it is only necessary to connect the gas inlet to the sensor module entrance. In this way, a flow rate up to 200sccm can be determined. It is also possible to increase the measurement range by applying the...

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MCQ Sensor Module Digital Mass Flow Meter and Controller Connections: Main components and connections in the sensor module board. Main Connector: Power supply: The board needs an analog power input of 10V and a digital power input of 3.3V with a maximum current of 100mA. Both power inputs are supplied through the pins in the main connector. I2C: The Sensor Module communicates and transmits data via a two-wire I2C bus system. Analog set-point: the analog input could be used to provide the sensor with an analog set point. This input put in use the ADC channel of the DSP microcontroller. If...

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MCQ Sensor Module Digital Mass Flow Meter and Controller UART Connection: UART 115.200 BPS. Service Connector: This service connector is conceived for debug and firmware update operations. Figure 8. Pin connections in the service connector. Figure 7. Pin connections in the UART connector www.mcqinst.com Rev. March 2010 V 1.0 (Preliminary) 6/7 1 2 3 4 DVDD 3.3V UART Transmitting data line UART Receiving data line GND 6 5 4 3 2 1 Master Clear DVDD 3.3V GND Clock signal Data signal Application hint: mass flow controller For those who want to realize their own mass flow controller, the sensor...

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MCQ Sensor Module Digital Mass Flow Meter and Controller www.mcqinst.com Rev. March 2010 V 1.0 (Preliminary) 7/7 Suggested valve amplification circuit: In the image below a suggested amplification circuit for the valve control is shown. The component used is a single channel omni-fet fully auto-protected power MOSFET, the VNS1NV04. Important Notice MCQ Instruments reserves the right to make corrections, modifications, enhancements, improvements and other changes to its products and services at any time and to discontinue any product or service without notice. Customers should obtain the...

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