Matsusada Prcision Single channel, Handy Bi-polar type ±1kV to ±5kV/6W 30W This is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. FEATURES Specially designed for Electrostatic Chuck application 镕 Fast response(10ms) with electronically polarity change Bi-polar output Օ Integrated RF filter(optional) Long life and high reliability with no relay DIMENSIONS inch(mm) 5.5Hx16.9Dx8.35W (140x430x212)

SPECIFICATIONS Input Voltage/Current Chuck ON/OFF 115VAC ±10% 50/60Hz 10/1Amax(6W) 3Amax(30W) HV switch on the front panel ON/OFF Օ Օ Local mode Օ Remote switch ON/OFF Օ Օ Remote mode Output voltage control with potentiometer on the front panel Օ Output voltage control with external voltage source AC input voltage ON/OFF Local : 10-turn potentiometer on the front panel Remote : External control voltage source Vcon-in = -10V to +10V Input impedance greater than 10kգ2 Local/Remote change is with toggle switch on the front panel 0.1%rms 3-digit digital meter (voltage » current select) Voltage:...