EJC series

Product catalog summary

Overview
This document describes a high voltage power supply specifically designed for electrostatic chuck applications. It features fast response times, bi-polar output, and optional integrated RF filters. The device is noted for its long life and high reliability without the use of relays.

Features

Specially designed for electrostatic chuck applications.
Fast response time of 10ms with electronic polarity change.
Bi-polar output ranging from ±1kV to ±5kV.
Optional integrated RF filter.
Long life and high reliability without relays.

Specifications

Input Voltage/Current: 115VAC ±10%, 50/60Hz, 1Ø/1A max (6W), 3A max (30W).
Output Voltage Control: Local control via a 10-turn potentiometer or remote control via an external voltage source.
Ripple: 0.1% rms.
Protection: Over current with automatic crossover, over voltage limited at 110%, output short circuit, arc protection, and interlock.
Temperature Range: 0°C to 40°C (operation), -40°C to +85°C (storage).

Models

Various models available with output voltage ranging from -1kV to +5kV and output current from 1.2mA to 30mA.

Control and Monitoring

Local/Remote status change via toggle switch on the front panel.
Output voltage control with potentiometer or external voltage source.
Digital panel meter for voltage and current selection.
Output monitor with impedance of 1kΩ.

Accessories

Includes input AC cable, output HV cable with HV-BNC connectors, and an instruction manual.

Contact Information

Headquarters located in Kusatsu, Shiga, Japan with additional offices in San Jose, New York, Dallas, and Kyoto.

Catalog excerpts

Matsusada Prcision Single channel, Handy Bi-polar type ±1kV to ±5kV/6W 30W This is a high voltage power supply developed especially for electrostatic chuck application. Chuck ON/OFF is possible by DC ON/OFF. Smooth release of wafer is also possible by reversing the polarity. FEATURES Specially designed for Electrostatic Chuck application 镕 Fast response(10ms) with electronically polarity change Bi-polar output Օ Integrated RF filter(optional) Long life and high reliability with no relay DIMENSIONS inch(mm) 5.5Hx16.9Dx8.35W (140x430x212)

Open the catalog to page 1

SPECIFICATIONS Input Voltage/Current Chuck ON/OFF 115VAC ±10% 50/60Hz 10/1Amax(6W) 3Amax(30W) HV switch on the front panel ON/OFF Օ Օ Local mode Օ Remote switch ON/OFF Օ Օ Remote mode Output voltage control with potentiometer on the front panel Օ Output voltage control with external voltage source AC input voltage ON/OFF Local : 10-turn potentiometer on the front panel Remote : External control voltage source Vcon-in = -10V to +10V Input impedance greater than 10kգ2 Local/Remote change is with toggle switch on the front panel 0.1%rms 3-digit digital meter (voltage » current select) Voltage:...

Open the catalog to page 2