ECA series
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cMcMatsusada Prcision ECAs senes 2ch output. Rack mount Bi-polar type ±1kV to ±10kV/6W 30W This is a high voltage power supply developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems(2ch) or bi-polar systems. i Specially designed for Electrostatic Chuck application i 2 output channels(1kV to 5kV) i Bi-polar output iBuilt-in RF filter is available(option) Fast response with electronically polarity change lUses no relay, so high reliability and long life IMENSIONS inch(mm) Front 6x1Qmm0 REMOTE CH1 kV CH2 kV 2 2 2 LOCAL mA mA i r P1 P2 r T H MODEL Height(H) P1 P2 Weight(lb) ECA-1B6x2 3.5"(89) 3"(76.2) 2"(5Q) 22 ECA-1B3Qx2 3.5"(89) 3"(76.2) 2"(5Q) ECA-3B2x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-3B1Qx2 3.5"(89) 3"(76.2) 2"(5Q) ECA-5B1x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-5B6x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-1QBQ.5 5.3"(133) 2.25"(57.15) 4"(1QQ) 33 ECA-1QB3 5.3"(133) 2.25"(57.15) 4"(1QQ) POWER HV □ □ Adj Adj © ® 18.3(465) with Protection cover 19(482) -n Rear D: 21.7(550) Remote control connector (D-sub 25pin female)

SPECIFICATIONS LINE UP Input voltage/current 115VAC ±10% 50/60Hz 10/1Amax(6W) 3Amax(30W) Chuck ON/OFF HV switch on the front panel ON/OFF(for 2ch) Օ Օ Local mode Remote switch ON/OFF(for each channel) Օ Օ Remote mode Voltage control with potentiometer on the front panel(for each channel) Օ Voltage control with external voltage source(for each channel) AC input voltage ON/OFF(for 2ch) Output voltage Local : 10-turn potentiometer on the front panel control (for each channel) Remote : external control voltage source(for each channel) Vcon-in = -10V to +10V Input Impedance greater than 10kգ2...