ECA series

Product catalog summary

Overview: This document details a high voltage power supply specifically designed for electrostatic chuck applications. It features two output channels with a voltage range from 1kV to 5kV, bi-polar output, and an optional built-in RF filter. The power supply is noted for its fast response and high reliability due to the absence of relays.

Specifications:

Output Channels: 2 (1kV to 5kV)
Bi-polar Output: Yes
RF Filter: Optional
Dimensions: Various models with specific dimensions provided
Input Voltage/Current: 115VAC ±10%, 50/60Hz, 1Ø/1Amax (6W), 3Amax (30W)
Output Voltage Control: Local (potentiometer) and Remote (external voltage source)
Ripple: 0.1%rms
Protection: Over current, over voltage, short circuit, and arc protection
Operating Temperature: 0°C to 40°C
Storage Temperature: -40°C to +85°C

Features:

Fast polarity change without relay
Remote control capability with a D-sub 25pin connector
Forced discharge function for quick grounding
Digital panel meter for voltage and current monitoring
Output relay and RF filter options available

Models and Options: The document lists various models (e.g., ECA-1B6×2, ECA-10B3) with specific output voltage and current capabilities. Options include output relay, RF filter, and output voltage limiter.

Applications: Suitable for both uni-polar and bi-polar systems, the power supply is designed to hold or release wafers by DC ON/OFF and allows smooth release by reversing polarity.

Contact Information: The document provides contact details for offices in San Jose, New York, Dallas, and Kyoto, Japan, along with the headquarters in Shiga, Japan.

Catalog excerpts

cMcMatsusada Prcision ECAs senes 2ch output. Rack mount Bi-polar type ±1kV to ±10kV/6W 30W This is a high voltage power supply developed especially for electrostatic chuck application. The wafer can be held or released by DC ON/OFF. Smooth release of chuck is also possible by reversing the polarity. This is an useful power supply suitable both for uni-polar systems(2ch) or bi-polar systems. i Specially designed for Electrostatic Chuck application i 2 output channels(1kV to 5kV) i Bi-polar output iBuilt-in RF filter is available(option) Fast response with electronically polarity change lUses no relay, so high reliability and long life IMENSIONS inch(mm) Front 6x1Qmm0 REMOTE CH1 kV CH2 kV 2 2 2 LOCAL mA mA i r P1 P2 r T H MODEL Height(H) P1 P2 Weight(lb) ECA-1B6x2 3.5"(89) 3"(76.2) 2"(5Q) 22 ECA-1B3Qx2 3.5"(89) 3"(76.2) 2"(5Q) ECA-3B2x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-3B1Qx2 3.5"(89) 3"(76.2) 2"(5Q) ECA-5B1x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-5B6x2 3.5"(89) 3"(76.2) 2"(5Q) ECA-1QBQ.5 5.3"(133) 2.25"(57.15) 4"(1QQ) 33 ECA-1QB3 5.3"(133) 2.25"(57.15) 4"(1QQ) POWER HV □ □ Adj Adj © ® 18.3(465) with Protection cover 19(482) -n Rear D: 21.7(550) Remote control connector (D-sub 25pin female)

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SPECIFICATIONS LINE UP Input voltage/current 115VAC ±10% 50/60Hz 10/1Amax(6W) 3Amax(30W) Chuck ON/OFF HV switch on the front panel ON/OFF(for 2ch) Օ Օ Local mode Remote switch ON/OFF(for each channel) Օ Օ Remote mode Voltage control with potentiometer on the front panel(for each channel) Օ Voltage control with external voltage source(for each channel) AC input voltage ON/OFF(for 2ch) Output voltage Local : 10-turn potentiometer on the front panel control (for each channel) Remote : external control voltage source(for each channel) Vcon-in = -10V to +10V Input Impedance greater than 10kգ2 Front...

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