CPFM-8800 High Purity Coriolis Flow Meter All-PFA* wetted Coriolis flow meter designed for measuring liquids in high-purity applications Features • Fluid measurement performance is inde pendent of fluid properties; eliminating the need to calibrate on different fluids • Accuracy unaffected by flow regime (e.g., laminar or turbulant flow) or variations in flow velocity profile • Sensors operate and measure in two-phase flow condetions with gas volumetric void fractions in excess of 30% The CPFM Series 8800 is a family of advanced flow meters based on the Coriolis principle fabricated exclusively from PFA* (Perfluoroalkoxy) polymeric material. Series 8800 flow meters are comprised of two assemblies: one containing the sensor, the other containing the supporting electronics. Series 8800 sensors are specially designed for measuring liquids in high-purity semiconductor, bio-pharmaceutical and other applications that require all PFA-wetted* surfaces and provide a Mass Flow Rate, Total Mass and Temperature. *Model 8808-1 and 8808-2 are also available in PEEK wetted parts. Measurement Principle Fluid flows into the sensor consisting of two flow sensitive elements which are vibrated relative to one another - similar to the tines of a tuning fork. Fluid interacts with the sensor dynamically in such a way that the sensor’s response is immune to the fluid’s chemical and physical properties flow regime, or variations in flow velocity profile. Fluid mass flow rate and fluid density are independently determined by measuring the relative motion and frequency of the flow-sensitive elements. • Highly corrosive chemicals • CMP slurries or solutions containing solid contents and/or bubbles • Pure water or ultra high purity chemicals • Fluids with varying density or viscosity

Measurement Specifications Accuracy Operating Pressure Measurement Range (g/min) Zero Offset Stability (Z.O.S) (g/min) * Pressure drop at Max. Flow range = 10 psi on water (1cP) ** Model 8808-1 and 8808-2 are also available in PEEK wetted parts. Electrical Specifications Supply Voltage Power Consumption Operator Parameter configuration through USB interface with a PC Output Interfaces 4-20 mA Current Loop, Digital I/O Analog Output Module Digital Input/Output Module Frequency Output 4-20 mA ; 500 Ohms max load Configurable as Frequency or Digital I/O 0 to 10 KHz proportional to flow rate Specifications...