Magnescale Co., Ltd. International Sales Department 3-1-4 Edagawa, Koto-ku, Tokyo 135-0051, Japan E-mail : [email protected] 1 Technology Drive, Suite F217, Irvine, CA 92618, USA E-mail : [email protected] Magnescale Europe GmbH Antoniusstrasse 14, 73249 Wernau, Germany E-mail : [email protected] Service & Parts 45 Suzukawa, Isehara-shi, Kanagawa 259-1146, Japan E-mail : [email protected] http://www.magnescale.com The contents of this literature are as of June 2018 This catalog is printed with soy ink. MGS-LS-1806-EN-C Magnescale reserves the right to change product specifications without prior notice.

No compromise for high-accuracy products The total quality control system that operates throughout the entire design and production process ensures products with enhanced safety, high quality, and high reliability that match our customers’ requirements. The company is certified for length calibration in compliance with the traceability system required by the “Weights and Measures Act,” and has been granted ISO 9001 certification, which is the international standard for quality assurance. Laserscale Our products comply with CE Marking requirements, have acquired UL certifications and meet other...

What's Lasers cale? The world of super-resolution is going further than 1nm Laserscale easily achieves measurement and control with ultra high resolution of better than 1nm. A sinusoidal wave (approximately 138nm signal pitch) is generated using the grating interference method by utilizing a holographic scale with high diffraction efficiency and a high resolution head. The BS series offers strong resistance to disturbance by air pressure or current, and is easy to install. Signal distortion, in principle, remains minimal at a high S/N ratio. Resolution of 17pm can be achieved using our automatic...

The semiconductor laser beam is split by a polarized light beam splitter into S and P polarized light beams, then diffracted through a volume holographic grating with very high diffraction efficiency. The two diffracted beams pass through separate 1/4-wavelength plates to a mirror, which reflects the beams back through the plates. This process converts the S polarized beam to P polarized light and the P polarized beam to S polarized light. The two beams are diffracted again through the volume holographic grating, then super-positioned by the polarized light beam splitter to create interference....

Lineup Series Minimum resolution Scale accuracy Measuring length Long length type Soda-lime glass Low expansion glass Soda-lime glass Low expansion glass: 30mm~420mm Soda-lime glass: 30mm~420mm Radius 12.03mm Radius 27.07mm Radius 36.10mm Radius 41.72mm Low expansion glass Soda-lime glass Low expansion glass: 30mm~410mm Soda-lime glass: 60mm~1,060mm Please ask for more than 1,060mm Low expansion glass Soda-lime glass Low expansion glass: 30mm~420mm Soda-lime glass: 60mm~1,060mm Please ask for

Scale movement Reference point 25±0.2* detection direction 25±0.2* N-M4 scale clamp mounting screw 2-M4 reference plate mounting screw 25±0.2* 23 Detector head mounting screw 2-M3x30 Reference point detection position Scale signal detection position Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines. High-speed and high-resolution, while maintaining stable, ultraprecision measuring. (with/without reference point) External Dimensions Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface....

External Dimensions External Dimensions L3±1 43 2-M4 reference plate mounting screw Detector head mounting screw 2-M3x30 Scale signal detection position Scale mounting hole 2-φ3.4 Scale mounting screw Detector head 2-M3x8 mounting hole 2-φ3.6 φ6.4 sinkhole depth 4 （bottom surface also） Detector head mounting screw 2-M3x30 Scale signal detection position Scale signal detection position N-M4 scale clamp mounting screw Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface properties of the scale mounting surface is Rmax = 6.3S. Note...

(with reference point) L3×N M-M4 Scale clamp mounting screw 2-M4 Reference plate mounting screw Scale signal detection position External Dimensions 2-M5 Detector head mounting screw High accuracy Laserscale with built-in optical reference point 2-M4 Reference plate mounting screw M-M4 Scale clamp mounting screw When there is an even number of scale clamps (BS65-260R/460R/660R/860R) Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface properties of the scale mounting surface is Rmax = 6.3S. Note 3: The surface properties of the...

(with/without reference point) P-4x10 Scale clamp mounting screw Scale signal detection position Scale clamp Ideal for low-profile stages, semiconductor back-end processing equipment 2-M4x10 Reference plate(BE-A) mounting screw Scale signal detection position Abutting surface for mounting Reference plate(BE-A) Penetrating 2-M3 For mounting detector head High-accuracy, reflective Laserscale with signal pitch of 250nm Reference signal detection position 2-M4x10 Reference plate(BE-C) mounting screw 101 96±0.1* Reference plane for mounting 2-ø5 hole Scale abutting surface (Note 5) 25±0.2* Abutting...

BH20-NED Straight cable exit Lateral cable exit (with/without reference point) External Dimensions Compact, reflective rotary Laserscale featuring high accuracy, 8.85 (Scale signal detection position) 4 precision measuring instruments, and aspheric surface processing machines. Ideal for high-resolution angle measuring in HDD manufacturing equipment, Counting direction 8.85 (Scale signal detection position) Counting direction high resolution and high response speed. Note: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Main Specifications Detector head...