*mydirectindustry

Catalogs
Magnescale Europe GmbH
Laserscale General Catalogue

Laserscale General Catalogue

Product catalog summary

Introduction
This document is a technical catalog from Magnescale Co., Ltd., detailing their Laserscale products designed for high-resolution measurement and control with ultra-high precision.

Specifications and Standards
The products comply with CE Marking, UL certifications, and international safety standards, including the European Machinery Directive and ISO 9001 for quality assurance.

Principle of Operation
The Laserscale uses a holographic scale with high diffraction efficiency to achieve a signal pitch of approximately 138nm, ensuring stability against external disturbances like air pressure and temperature changes.

Product Lineup
The catalog lists models such as BS78, BS65-R, BH25-RE/NE, each offering features like high resolution, stability, and ease of installation. The BS series provides a resolution of 17pm and a maximum response speed of 400mm/s.

Applications
Laserscale products are suitable for precision machining, semiconductor inspection, and ultraprecision processing machines, requiring ultra-precise positioning and measurement.

Technology
The technology involves a semiconductor laser beam split into polarized light beams, diffracted through a holographic grating, and recombined to create interference patterns, ensuring high repeatability and minimal error.

Key Features
- High-resolution scale with a signal pitch of approx. 138nm.
- High stability against environmental disturbances.
- Non-contact design for eliminating return errors.
- Special models available for non-magnetic and vacuum-compatible environments.

Conclusion
Magnescale's Laserscale products offer advanced measurement solutions with high precision and reliability, suitable for various industrial applications.

Overview
The document provides detailed specifications and guidelines for the BL57 series models, focusing on A/B quadrature output and analog output systems, including measuring lengths, external dimensions, and mounting instructions.

Specifications

Output Signal Form: A/B quadrature output and analog 1Vp-p output.
Detection Principle: Diffraction grating scanning system.
Grating Pitch: 1.6μm with a signal pitch of 0.4μm (400nm).
Thermal Expansion Coefficient: Low expansion glass: -0.7 x 10-6/˚C; Soda-lime glass: 8 x 10-6/˚C.
Resolution: Selectable between 0.1/0.05μm and 0.02/0.01μm.
Max Response Speed: Up to 3,000mm/s depending on resolution and cable length.

Mounting and Surface Properties

Machining dimensions are indicated by an asterisk.
Surface properties for scale and detector head mounting surfaces are Rmax = 6.3S and Rmax = 12.5S, respectively.
Flatness of the scale mounting surface must be within 0.02 over 7x200mm.
Reference plates must be mounted with parallelism of 0.1 or less with respect to the machine guide.

Models and Dimensions

Models range from BL57-003RE*C to BL57-106NE*B, with measuring lengths from 30mm to 1060mm.
External dimensions vary based on model and measuring length, with detailed specifications for mounting holes and reference plates.

Environmental and Operational Conditions

Operating temperature: 0 to +40˚C (no condensation).
Storage temperature: -10 to +50˚C.
Vibration resistance: 100m/s2 (50 to 2000Hz).
Impact resistance: 200m/s2.

Additional Notes

Special models support vacuum environments with ultra-precise positioning capabilities.
Max response speed may be limited by output cable length and power supply line length.
Surge protection measures are recommended for power supply lines longer than 10m.

Main Specifications
The document outlines the specifications for various models of interpolators and laserscales, including BD95 and BD96 series. Key specifications include:

Resolution ranging from 4.3nm to 34.5nm depending on the number of divisions.
High response speed up to 1,100mm/s when connected with BL series.
Power supply requirements: DC +24V±1V for BD95 and DC +5V, +12V, -12V for BD96.
Operating temperature range from 0 to 50˚C and storage temperature from -10 to 60˚C.
Dimensions and mass vary by model, with BD95 approximately 0.8 kg and BD96 approximately 1.6 kg.

Output and Signal Specifications
The document details the output signal types and specifications:

A/B quadrature output compliant with EIA-422 standards.
Minimum phase difference of 38ns for BL57 models.
Various serial or binary outputs available, including Yaskawa Electric and Mitsubishi Electric serial outputs.
Alarm functions with automatic reset and holding options.

Connection and Cable Specifications
The document provides information on connection and cable specifications:

Output cable length affects maximum response speed.
Power supply lines longer than 10m require surge protection and are incompatible with EN61000-6-2.
Various cable lengths and types are available, with specific recommendations for robot cables and extension cables.

Installation and Mounting
The document includes detailed installation and mounting instructions:

Reference plate and scale clamp mounting instructions with specific screw types and dimensions.
Recommendations for signal ground connections and load resistance settings to prevent damage and ensure proper operation.

Additional Notes
The document contains additional notes and recommendations:

Magnescale reserves the right to change product specifications without prior notice.
Recommendations for using twisted pair cables for differential signal cables.
Guidance on reference point detection direction to maintain reliability.

Catalog excerpts

Magnescale Co., Ltd. International Sales Department 3-1-4 Edagawa, Koto-ku, Tokyo 135-0051, Japan E-mail : [email protected] 1 Technology Drive, Suite F217, Irvine, CA 92618, USA E-mail : [email protected] Magnescale Europe GmbH Antoniusstrasse 14, 73249 Wernau, Germany E-mail : [email protected] Service & Parts 45 Suzukawa, Isehara-shi, Kanagawa 259-1146, Japan E-mail : [email protected] http://www.magnescale.com The contents of this literature are as of June 2018 This catalog is printed with soy ink. MGS-LS-1806-EN-C Magnescale reserves the right to change product specifications without prior notice.

Open the catalog to page 1

No compromise for high-accuracy products The total quality control system that operates throughout the entire design and production process ensures products with enhanced safety, high quality, and high reliability that match our customers’ requirements. The company is certified for length calibration in compliance with the traceability system required by the “Weights and Measures Act,” and has been granted ISO 9001 certification, which is the international standard for quality assurance. Laserscale Our products comply with CE Marking requirements, have acquired UL certifications and meet other...

Open the catalog to page 2

What's Lasers cale? The world of super-resolution is going further than 1nm Laserscale easily achieves measurement and control with ultra high resolution of better than 1nm. A sinusoidal wave (approximately 138nm signal pitch) is generated using the grating interference method by utilizing a holographic scale with high diffraction efficiency and a high resolution head. The BS series offers strong resistance to disturbance by air pressure or current, and is easy to install. Signal distortion, in principle, remains minimal at a high S/N ratio. Resolution of 17pm can be achieved using our automatic...

Open the catalog to page 3

The semiconductor laser beam is split by a polarized light beam splitter into S and P polarized light beams, then diffracted through a volume holographic grating with very high diffraction efficiency. The two diffracted beams pass through separate 1/4-wavelength plates to a mirror, which reflects the beams back through the plates. This process converts the S polarized beam to P polarized light and the P polarized beam to S polarized light. The two beams are diffracted again through the volume holographic grating, then super-positioned by the polarized light beam splitter to create interference....

Open the catalog to page 4

Lineup Series Minimum resolution Scale accuracy Measuring length Long length type Soda-lime glass Low expansion glass Soda-lime glass Low expansion glass: 30mm~420mm Soda-lime glass: 30mm~420mm Radius 12.03mm Radius 27.07mm Radius 36.10mm Radius 41.72mm Low expansion glass Soda-lime glass Low expansion glass: 30mm~410mm Soda-lime glass: 60mm~1,060mm Please ask for more than 1,060mm Low expansion glass Soda-lime glass Low expansion glass: 30mm~420mm Soda-lime glass: 60mm~1,060mm Please ask for

Open the catalog to page 5

Scale movement Reference point 25±0.2* detection direction 25±0.2* N-M4 scale clamp mounting screw 2-M4 reference plate mounting screw 25±0.2* 23 Detector head mounting screw 2-M3x30 Reference point detection position Scale signal detection position Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines. High-speed and high-resolution, while maintaining stable, ultraprecision measuring. (with/without reference point) External Dimensions Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface....

Open the catalog to page 6

External Dimensions External Dimensions L3±1 43 2-M4 reference plate mounting screw Detector head mounting screw 2-M3x30 Scale signal detection position Scale mounting hole 2-φ3.4 Scale mounting screw Detector head 2-M3x8 mounting hole 2-φ3.6 φ6.4 sinkhole depth 4 （bottom surface also） Detector head mounting screw 2-M3x30 Scale signal detection position Scale signal detection position N-M4 scale clamp mounting screw Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface properties of the scale mounting surface is Rmax = 6.3S. Note...

Open the catalog to page 7

(with reference point) L3×N M-M4 Scale clamp mounting screw 2-M4 Reference plate mounting screw Scale signal detection position External Dimensions 2-M5 Detector head mounting screw High accuracy Laserscale with built-in optical reference point 2-M4 Reference plate mounting screw M-M4 Scale clamp mounting screw When there is an even number of scale clamps (BS65-260R/460R/660R/860R) Note 1: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Note 2: The surface properties of the scale mounting surface is Rmax = 6.3S. Note 3: The surface properties of the...

Open the catalog to page 8

(with/without reference point) P-4x10 Scale clamp mounting screw Scale signal detection position Scale clamp Ideal for low-profile stages, semiconductor back-end processing equipment 2-M4x10 Reference plate(BE-A) mounting screw Scale signal detection position Abutting surface for mounting Reference plate(BE-A) Penetrating 2-M3 For mounting detector head High-accuracy, reflective Laserscale with signal pitch of 250nm Reference signal detection position 2-M4x10 Reference plate(BE-C) mounting screw 101 96±0.1* Reference plane for mounting 2-ø5 hole Scale abutting surface (Note 5) 25±0.2* Abutting...

Open the catalog to page 9

BH20-NED Straight cable exit Lateral cable exit (with/without reference point) External Dimensions Compact, reflective rotary Laserscale featuring high accuracy, 8.85 (Scale signal detection position) 4 precision measuring instruments, and aspheric surface processing machines. Ideal for high-resolution angle measuring in HDD manufacturing equipment, Counting direction 8.85 (Scale signal detection position) Counting direction high resolution and high response speed. Note: The items marked by an asterisk indicate the machining dimensions on the mounting surface. Main Specifications Detector head...

Open the catalog to page 10

All Magnescale Europe GmbH catalogs and technical brochures

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

Brand list