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- SCANplus 300 x 300
SCANplus 300 x 300
SCANplus 300 x 300
The document provides technical specifications for the Scanning Stage SCANplus 300 × 300 with an integrated measuring system, designed for reflected-light applications. It includes L-shaped supporting legs and an electronic stage identification device (ETS) for automatic identification and parametrization with Märzhäuser TANGO controllers.
Order Information
Order No.: 00-0124-1204-0000
Product Features
- Integrated measuring system
- 5-year guarantee when used with Märzhäuser TANGO controller
Accessories
Vacuum Wafer Holder, rotatable for 8" and 12" wafers (Order No.: 00-29-350-8000)
Specifications
- Travel range: 300 × 300 mm (12" × 12")
- Maximum travel speed: 240 mm/s (with 4 mm ball screw pitch)
- Repeatability: < 1 µm (bidirectional)
- Accuracy: ±1 μm
- Resolution: 0.05 µm (smallest step size)
- Orthogonality: < 10 arcsec
- Motor type: 2-phase stepper motor
- Limit switches: light barriers
- Material/surface: aluminium with anodic coating, black lacquered
- Weight: approx. 22 kg
Certifications
The product is certified under DIN EN ISO 9001 by TÜV NORD CERT GmbH.
Additional Information
Specifications are subject to change without notice. For more products, visit the Märzhäuser website at www.marzhauser.com.
Catalog excerpts
Marzhauser Wetzlar GmbH & Co. KG In der Murch 15 | 35579 Wetzlar | Germany Tel.: +49 6441 9116-0 | Fax: +49 6441 9116-40 [email protected] | www.marzhauser.com Scanning Stage SCANplus300 x 300 with Integrated Measuring System Specifications Order Information Order No.: 00-0124-1204-0000 Product Features □ with integrated measuring system □ L-shaped supporting legs □ integrated electronic stage identification device ETS for automatic identification of the scanning stage and parametrization of the controller □ 5 years guarantee, if the scanning stage is operated in the system with the Marzhauser TANGO controller Accessories Vacuum Wafer Holder rotatable, for 8" and 12" wafers Order No.: 00-29-350-8000 Specifications are subject to change without notice.
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