nanoScale The individual magnetic length measuring system with a repeat accuracy of < 0.1

Product catalog summary

Product Overview: The nanoScale is a magnetic length measuring system by Märzhäuser Sensotech GmbH, offering a repeat accuracy of less than 0.1 μm. It features a contact-free, magnetic measuring method and is designed for compact applications with a minimum gauge of 7 mm. The system provides absolute measurements through distance-encoded reference marking and maintains precision even when the scale is contaminated with oil or dust. Scales can be made from aluminium, glass, or ceramic, with custom geometries available.

Scope of Delivery: The product includes a solid measure tailored to specific geometry, material specifications, and electrical connections. It also includes a measuring head, available in TTL or analogue 5 Vss versions. An optional position display device, SCDplus, is available.

Specifications: The system offers a repeat accuracy/hysteresis of +/- 0.1 μm and an absolute accuracy of +/- 3 μm at a 650 mm scale length at +20°C. The magnetic pole pitch is 500 μm, with a measuring distance to the scale of 200 μm +/- 50 μm. The scale geometry is customizable, with a maximum measuring length of 650 mm and a minimum of 2 mm. The scale length is the measuring length plus 10 mm, and the minimum scale width is 7 mm. The expansion coefficient varies by material: aluminium (23), ceramic (6-8), and glass ceramic (<0.1). The system operates in temperatures from -30°C to +80°C and is resistant to mechanical harm and chemicals like water, salt-water, oil, and grease. It conforms to CE and RoHs standards.

Measuring Heads: The nanoScale TTL Measuring Head provides a TTL source signal with a maximum resolution of 61 nm and optional interpolation factors. Its dimensions are 29 x 32 x 7 mm. The Analogue Measuring Head 5 Vss offers a sine/cosine signal with a high signal-to-noise ratio, requiring offset compensation by the evaluation unit. Its dimensions are 29 x 32 x 6 mm.

Catalog excerpts

nanoScale The individual magnetic length measuring system with a repeat accuracy of < 0.1 -1

Märzhäuser Sensotech GmbH An den Fichten 35 | D-35579 Wetzlar Tel.: +49 6441 67106-0 Fax: +49 6441 67106-28 [email protected] www.marzhauser-st.de nanoScale The individual magnetic length measuring system with a repeat accuracy of < 0.1 ìm. Product Features: • contact-free, magnetic measuring method • repeat accuracy < 0,1 ìm • very compact dimensions • gauge at least 7 mm • absolute measurement by distance-encoded reference marking • permanent precise measuring, even if scale is fouled with oil, dust etc. • scales made of aluminium, glass or ceramic • customised scale geometry available on request • economic solution nanoScale with magnetic coated carrier made of glass-ceramic. Scope of Delivery Solid measure according to your requirements regarding: • geometry • material specification • electrical connection Measuring Head: • measuring head TTL or • measuring head analogue 5 Vss Optional: • position display device SCDplus measuring head solid measure Dated: November 2010 SCDplus (optionally available)

Open the catalog to page 1

nanoScale The individual magnetic length measuring system with a repeat accuracy of < 0.1 -2

Specifications repeat accuracy / hysteresis: +/- 0,1 ìm absolute accuracy at 650 mm scale length: +/- 3 ìm at +20° C accuracy of the magnetic solid measure at 650 mm length: +/- 1 ìm magnetic pole pitch: 500 ìm measuring distance to scale: 200 ìm +/- 50 ìm reference marking: individual marking anywhere on scale, distance-encoded marking for absolute positioning. scale geometry: customised scale manufacturing (standard scales available) measuring length max.: 650 mm measuring length min.: 2 mm scale length: measuring length + 10 mm scale width min.: 7 mm expansion coefficient in 10-6 m / m / K...

Open the catalog to page 2