Märzhäuser Sensotech GmbH An den Fichten 35 | D-35579 Wetzlar Tel.: +49 6441 67106-0 Fax: +49 6441 67106-28 [email protected] www.marzhauser-st.de nanoScale The individual magnetic length measuring system with a repeat accuracy of < 0.1 ìm. Product Features: • contact-free, magnetic measuring method • repeat accuracy < 0,1 ìm • very compact dimensions • gauge at least 7 mm • absolute measurement by distance-encoded reference marking • permanent precise measuring, even if scale is fouled with oil, dust etc. • scales made of aluminium, glass or ceramic • customised scale geometry available on request • economic solution nanoScale with magnetic coated carrier made of glass-ceramic. Scope of Delivery Solid measure according to your requirements regarding: • geometry • material specification • electrical connection Measuring Head: • measuring head TTL or • measuring head analogue 5 Vss Optional: • position display device SCDplus measuring head solid measure Dated: November 2010 SCDplus (optionally available)

Specifications repeat accuracy / hysteresis: +/- 0,1 ìm absolute accuracy at 650 mm scale length: +/- 3 ìm at +20° C accuracy of the magnetic solid measure at 650 mm length: +/- 1 ìm magnetic pole pitch: 500 ìm measuring distance to scale: 200 ìm +/- 50 ìm reference marking: individual marking anywhere on scale, distance-encoded marking for absolute positioning. scale geometry: customised scale manufacturing (standard scales available) measuring length max.: 650 mm measuring length min.: 2 mm scale length: measuring length + 10 mm scale width min.: 7 mm expansion coefficient in 10-6 m / m / K...