PTFE Membrane and Low Boron ULPA Filters for Microelectronic Industry Boron- and Phosphor free Near zero outgassing Very high efficiencies at lowest pressure drop Water repellant High mechanical strength,

Luwa CR, CRB and CRP ULPA filters for the microelectronic industry Efficiencies, pressure drop and frame Each filter is individually tested for effi- design may be chosen out of the com- clency, leaks and pressure drop accord- prehensive range of Luwa CR, CRB and ing to EN1822 on the Luwa ULPACATS CRP filters. The main performances of filter test rig (picture above). the three basic types of ULPA filters for Material specification Filter media: see table above Pleat separators: Hot Melt strings Frame: Anodlsed extruded aluminium profiles Sealant: Polyurethane EPDM rubber Customised dimensions...