Luwa AFP-AA Filters with a functionalised microgranular polymer to adsorb amines through ion exchange, combined with a final layer of highly activated and specificly impregnated microgranular carbon for the chemisorption of acidic by-products. Typical Application: – Microelectronic industry – Other industries Luwa AFP-AA filters are particularly effective against alkaline gase, e.g.: q Bases q Amines q Ammonia (NH3, NH4) q NMP, HMDS Technical data AFP- AA-305 AA-420 AA-508 AA-610 Max. air flow VM (short service life) m3/h 1700 2300 2700 3400 Pressure drop at VM Pa 70 70 65 65 3 Rated air flow VR (long service life) m /h 850 1150 1350 1700 Pressure drop at VR Pa 30 30 25 25 Total weight of filter kg 4.3 5.6 6.8 7.6 Net weight of adsorbant kg 2.4 3.7 4.3 5.4 Filter medium area m2 4.7 7.1 8.4 10.3 Adsorption capacity 4) at VR for NH3** ppb· h 67’374 98’367 122’082 149’571 Initial efficiency at VR for NH3 % 99 99 99 99 *down to 70% efficiency at 23 °C and 50% relative humidity . Dynamic Adsorption for NH3 at VR Luwa AFP Gas Adsorption Filters This documentation is regularly checked for correctness and validity, and can be subject to change at any time without separate notification. 50 ne d rge ge la en ran 40 30 w 100% = 5 ppm 20 10 To reduce airborne molecular contamination, in Clean Rooms, unpleasant odors, VOC’s, anthropogenes 0 0 10 20 30 Time [h] 48.15.11 / e / Wep / 3.2000 Break through [%] 60 Printed on environmental friendly bleached paper (free of chlorine) Luwa AFP-AA – for the removal of alkaline AMC’s q High contamination removal efficiency – even for ppb concentration levels q Low pressure drop – saves energy – retrofits possible q Media options for specific removal of amines and acids © Copyright McLeod Russel Filter AG 5 McLeod Russel Filter AG Wilstrasse 11 CH-8610 Uster [email protected] www.mcleodrussel.ch Telephone +41 (0)1 943 36 36 Fax +41 (0)1 943 36 37 Group companies representatives in most European countries. q No dust release – near zero out-gassing – no discharge of adsorbed gases q Also effective as particle filter q Fits ordinary fine dust filter frame systems q Light weight – easy to handle q Throw away unit – no medium replacement q Problem free disposal by incineration

Luwa AFP-Filters – the new approach to gas phase filtration Luwa AFP-AZ – for the removal of VOC’s and other AMC’s Luwa AFP-AS – for the removal of acidic AMC’s It is becoming more and more important to remove airborne molecular contamination (AMC) from air, used for general ventilation and for critical production processes in Clean Rooms. Whilst particulate removal has been the priority in the past, the elimination of AMC has become the focus for future improvements of indoor air quality (IAQ) or process environments. Various gases can be controlled using the three different grades (AZ, AS and...

Luwa AFP-Filters – the new approach to gas phase filtration Luwa AFP-AZ – for the removal of VOC’s and other AMC’s Luwa AFP-AS – for the removal of acidic AMC’s It is becoming more and more important to remove airborne molecular contamination (AMC) from air, used for general ventilation and for critical production processes in Clean Rooms. Whilst particulate removal has been the priority in the past, the elimination of AMC has become the focus for future improvements of indoor air quality (IAQ) or process environments. Various gases can be controlled using the three different grades (AZ, AS and...

Luwa AFP-Filters – the new approach to gas phase filtration Luwa AFP-AZ – for the removal of VOC’s and other AMC’s Luwa AFP-AS – for the removal of acidic AMC’s It is becoming more and more important to remove airborne molecular contamination (AMC) from air, used for general ventilation and for critical production processes in Clean Rooms. Whilst particulate removal has been the priority in the past, the elimination of AMC has become the focus for future improvements of indoor air quality (IAQ) or process environments. Various gases can be controlled using the three different grades (AZ, AS and...

Luwa AFP-AA - for the removal of alkaline AMC's Luwa AFP-AA Filters with a functionalised micro- granular polymer to adsorb amines through Ion exchange, combined with a final layer of highly activated and speciflcly Impregnated microgranular carbon for the chemisorptlon of acidic Typical Application: - Microelectronic Industry - Other industries *down to 70% efficiency at 23 °C and 50% relative humidity Luwa AFP-AA filters are particularly effective against alkaline gase, e.g.: This documentation is regularly checked subject to change at any time without separate notification.

Luwa AFP Gas Adsorption Filters Luwa AFP-AA – for the removal of alkaline AMC’s Luwa AFP-AA Filters with a functionalised microgranular polymer to adsorb amines through ion exchange, combined with a final layer of highly activated and specificly impregnated microgranular carbon for the chemisorption of acidic by-products. Typical Application: – Microelectronic industry – Other industries Luwa AFP-AA filters are particularly effective against alkaline gase, e.g.: q Bases q Amines q Ammonia (NH3, NH4) q NMP, HMDS Break through [%] 60 Technical data AFP- AA-305 AA-420 AA-508 AA-610 Max. air flow...