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Positioning Stage XY 35/35 GL Tecnical Parameter X-Y Stage with air-bearings and linear motors for highly dynamic positioning and measuring tasks in the micrometer range Parameters Data Range of travel XY: 350 x 350 mm2 Measuring system accuracy: linear: ± 3 µm/m Yaw and pitch angles: 2 sec und 4 sec Max. speed: 350 mm/sec Max. acceleration: 1g Internal resolution: 0,05 µm Min. settable step length: 0,625 µm Repetition accuracy: ± 0,5 µm Additional mass: centric ca. 20 kg Area needed for installation LxWxH: 1,1 x 1,1 x 0,9 m Total weight: ca. 1,2 t Temperature conditions: • Change with time Air humidity: max. 60 % Compressed air supply: • Residual oil content: • Solid particles: • Moisture: Air consumption: 20°C ±0,5°C max. 0,5°C / h controlled 7,0 bar ± 0,1 bar < 7 mg/m3 < 3µm 5,953 g/m3 ca. 1100 l/h Adaptation to OEM and specific applications is made in consultation with the customer. A report compiled by laser-interferometer gives a precise statement of the guiding and positional accuracy. LPKF Motion & Control GmbH LPKF-Products Präzisionsantriebe / Precision Drives Steuerungen / Control Systems / Software Mittelbergstraße 17 D 98527 Suhl fon: + 49 36 81 / 89 24-0 fax: + 49 36 81 / 89 24-44 mail: info@lpkf-mc.de internet: http://www.lpkf-mc.de Meßtechnik / Measurement Engenieering Highest accuracy over 350 x 350 mm2 Sondersysteme / Special Systems Precision Drives Positioning Stages XY 35/35 GL

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gearless, 2-dimensional direct drive with a carriage which is air-guided particular high demands on quality to the guidance in the Z-coordinate use of most advanced drive, measuring and guiding components. quadruple safety before exceeding the range of travel competence developed over more than 15 years experience in building high-precision positioning systems General Description The LPKF XY 35/35 GL is a positioning table with air-bearings which has been specifically designed to meet the exacting requirements of metrology and laser structuring. The combination of fast linear motors and a...

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