DL SERIES PRECISION LAPPING SYSTEMS High-speed polishing systems with driven-head technology for the semi-automated polishing of “hard-to-process” materials.

DP SERIES PRECISION POLISHING SYSTEMS The Logitech DP high speed polishing systems were developed to address the issue of polishing times when processing semiconductor materials often describe as “hard” to polish within the industry. These systems have been designed for semiautomated final stage polishing of hard materials such as sapphire, silicon carbide (SiC) or gallium nitride (GaN). Available as with a single or four workstations, the DP range can process materials up to 300mm (or multiple smaller samples) on the DP1 and 260mm per workstation (or multiple smaller samples) on the DP4. The...

KEY FEATURES & FUNCTIONALITY → Stand-alone system with the option to come as a single or four station unit, with a process capacity of up to 300mm on the DP1 and 260mm per workstation on the DP4 (or multiple smaller samples). → Door interlocks are installed on the DP systems while the built-in fume cabinet caters for processes involving toxic materials ensuring current health and safety regulations are adhered to. → The DP1 polishing carrier head can apply up to 200kg of download and the DP4 up to 50kg per carrier head - resulting in the highest sample thoughput of any Logitech polishing system....

TECHNICAL SPECIFICATIONS System Power Supply Plate Diameter Carrier Speed Carrier Download Slurry Flow Rate Logitech Ltd Erskine Ferry Road Old Kilpatrick Glasgow, G60 5EU United Kingdom Tel: +44 (0) 1389 875 444 Email: [email protected] Web: logitech.uk.com