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- CMP Orbis
CMP Orbis
CMP Orbis
- Designed for R&D environments, suitable for pilot production tests.
- Accommodates two samples up to 200mm/8” or multiple smaller samples using templates.
- Recipe mode for building, saving, and recalling multi-stage processes, ensuring repeatability across different operators.
- Equipped with sophisticated software for enhanced analytical and data collection capabilities.
- Twin peristaltic pumps for controlled slurry delivery, allowing different slurries for varied processing needs.
- Motor-driven carriers with a wafer process capacity of up to 200mm/8”.
- Touch screen interface for configuring parameters and process conditions, including CoF, carried load, and slurry delivery.
- Includes a CMP diamond pad conditioner for effortless pad conditioning during sample processing.
- Motor-driven carrier heads and plate speeds up to 160rpm for faster polishing rates and greater control.
- Chemically resistant to standard CMP chemicals, with integrated sample cleaning using de-ionised water and nitrogen gun.
- Carrier sizes: 100mm/4”, 150mm/6”, 200mm/8”.
- Dimensions: Height - 1950mm, Width - 1680mm, Depth - 781mm.
- Power Supply: 220Vac-240Vac, 25Amps, 50/60Hz.
- Plate diameter: 600mm.
- Carrier speed: 10-125rpm.
- Slurry flow rate: 20-500 ml/per minute.
Catalog excerpts
Achieve results typically found in production scale equipment and enhance your CMP research capabilities with this floor standing CMP tool.
Open the catalog to page 1
→→Floor standing CMP tool ideally suited to R&D environments - typically used in applications which conduct pilot production tests. →→ High capacity works pace for two samples up to 200mm/8” - or multiple smaller samples through the use of templates The CMP Orbis is a precision engineered, floor standing Chemical Mechanical Polishing (CMP) system ideally suited for R&D environments where the main purpose or application is to conduct pilot production tests with optimum analytical capabilities and enhanced process performance. →→Produces results typically seen on production scale equipment whilst...
Open the catalog to page 2
TECHNICAL SPECIFICATIONS Carrier sizes available: Power Supply: Plate diameter: Carrier speed: Slurry flow rate:
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