Vacuum Measurement - Sensors
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Vacuum Measurement - Sensors - 1

Vacuum Measurement User-optimized Active Gauges for various applications from 2000 mbar to 1010 mbar

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Vacuum Measurement - Sensors - 2

Measurement principles suited for your application Direct, gas type independent pressure measurement Vacuum sensors: capacitive and piezo pressure sensors with a pressure range from 10-1 mbar to 2000 mbar in absolute pressure measurements and -1000 mbar to +1000 mbar in relative pressure measurements. The direct (absolute) type of pressure measurement is independent of the gas type to be measured. The measurement is performed mechanically by way of the pressure acting upon the surface of a diaphragm. thermal conductivity vacuum gauges after Pirani. cold cathode ionization vacuum gauges...

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The ideal vacuum gauge for your requirements Application Sensors:  Research and Development CERAVAC Linear pressure THERMOVAC CTR sensors DI/DU TTR Chemical/Chemistry processes Heat Treatment/Metallurgy High vacuum pump systems n Chemistry and Research laboratories For further application examples, please refer to our full line catalog, chapter “vacuum - measuring, controlling”. Leybold transmitters are specially suited for system integration Our high-precision vacuum sensors meet your demands: n Highly reliable fore vacuum pressure measurement operation reproducible measurement measurement...

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Vacuum Measurement - Sensors - 4

TTR 101 N(S) The THERMOVAC TTR 101 N models use a thermal conductivity MEMS Pirani / Piezo solid state sensor combination. They are resilient to vibration and shock venting and provide superior accuracy and gas type independent readings between 10 mbar and 1500 mbar. Benefits ■ Two-in-one sensor: cost and space saving measurement solution ■ Large measurement range and time-saving measurements Principle of measurement Thermal conductivity after Pirani combined with Piezo Measurement/display range 5 • 10-5 to 1500 mbar Principle of measurement Thermal conductivity after...

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Vacuum Measurement - Sensors - 5

Multiple function Gauges Cold Cathode Ionization GaugeslHot Cathode Ionization Gauges PENNINGVAC Transmitters PTR 90 N These PENNINGVAC transmitters are the perfect gauge for a wide range of applications. Benefits ■ New MEMS-Pirani / cold cathode combination for cost and time-saving measurements ■ Complete coverage of the measurement range from 1x 10-8 mbar to atmosphere by a single transmitter ■ Automatic ignition from the MEMS-Pirani to the cold cathode: ease of use and high process stability ■ Modular design for easy servicability Principle of measurement Cold cathode ionization after...

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Vacuum Measurement - Sensors - 6

Technical Data Vacuum Transmitter CERAVAC Capacitance diaphragm Capacitance diaphragm Capacitive ceramic Piezo resistive ceramic Inconel® diaphragm sensor Inconel® diaphragm sensor diaphragm sensor diaphragm TTR 91 N(S): MEMS-Pirani TTR 96 N: Coated MEMS-Pirani Measurement range / mbar Display range Measurement uncertainty mbar 0.2% of reading ± temperature effect 0.5% of reading ± temperature effect (0.1 Torr) 0.12% of reading ± temperature effect 0.15% of reading ± temperature effect (0.1 Torr) DI/DU 2001 rel.: -1000 to +1000 relative pressure 0.25 % of full...

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TTR 911 N Display: -TTR 911 N S: RS 232 TTR 911 N: EtherCAT TTR 911: Profibus&nb

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Vacuum Measurement - Sensors - 8

Display and Operating Instruments for active sensors from the series matching connection lines, 5 m DISPLAY THREE GRAPHIX THREE Ordering Information (extract from the product range) Printed in Germany on chlorine-free bleached paper Technical alterations reserved For more detailed information and the entire product range, please refer to the Leybold full line catalog.

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