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UNIVEX
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UNIVEX Experimental systems for thin film coating and space simulation

Experimentation systems Vacuum based Physical Vapor Deposition (PVD) processes are critical and enabling components of many modern technologies and components. Both researching new fundamental phenomenon and developing new products require laboratory testing and integration of PVD processes. Having a reliable, repeatable and professional platform on which to perform research and pilot-scale experiments of vacuum coating is essential to efficient and cost effective development. The UNIVEX family of vacuum coating systems make professional results possible. UNIVEX systems are standardized for...

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Space simulation Thin ﬁlm deposition units UNIVEX The UNIVEX system range is well established for experimental coating and thin film deposition applications in university and industrial research and pilot production. UNIVEX are multipurpose coating systems for the production of functional physical deposition (PVD) layers. Features such as modular designs, variable chamber sizes and a numerous accessories make UNIVEX systems versatile across wide fields of applications Leybold provides UNIVEX system solutions, customizable for specific process needs. Our UNIVEX enable highly reproducible...

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Universally configurable for almost all vacuum PVD coating processes Compact footprint Easy to retrofit and upgrade Incorporates modern vacuum technology and electronics UNIVEX Box Coating systems are designated by number representing their chamber widths Basic models UNIVEX G Glove Box Systems UNIVEX C Cluster Tool UNIVEX S Space Simulation

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Box coating systems Advantages ■ ■ UNIVEX UNIVEX UNIVEX UNIVEX Modular system design Pump system optimized to the application Multi-purpose vacuum chamber Convenient access to all installed equipment The UNIVEX box coaters systems consist of a process and a control module: Process module: - vacuum chamber - coating components - pump system Simple operation Multiple deposition techniques in same chamber Control module: - PLC, PC controller - HMI visualization - Power supply and distribution Cleanroom compatible compact, high performance systems Compact unit with direct access to the process...

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Glove box systems Advantages ■ Direct and easy access to process equipment via front side sliding door Convenient service access via back side hinged door Customized system configuration Integration of any process components Easy operation via full color touchscreen Typical applications UNIVEX G matches easily with a glovebox of your choice Vacuum chamber Vacuum deposition of metals onto oxygen/ moisture sensitive layers, including organic electronics or biological samples - Organic based photovoltaics (OPV) - Organic light-emitting diodes (OLED) - Flexible / organic electronics Box-shaped...

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Cluster tool systems Design ■ ■ Central load lock system Central transfer chamber with vacuum robot Separate pump systems for each chamber PLC controlled, fully automated system operation Typical applications the cluster tool solution Customized system design Programmable, recipe controlled process sequence Fully automated process control Excellent process vacuum, low residual gas contaminates Easy operation via full color touchscreen PLC Automated coating sequences in research, development and pilot production Multiple deposition chambers for sputtering metals and dielectrics Applications...

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Dactyloscopy systems Space simulation proven in laboratories for criminal investigations customized system solutions for space simulation Coating of large areas up to 800 x 400 mm Short cycle times, depending on the material with the fingerprint evidence Good contrast and visibility on multicolor surfaces The material containing the finger print evidence remains undamaged Metal evaporation process to reveal fingerprints on items containing finger print evidence Typically, the system comprises a cylindrical vacuum chamber with high vacuum system and supply module with process controller The...

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