TURBOVAC iX Turbomolecular Pumps 90 l/s - 450 l/s

With TURBOVAC iX, highest functionality meets outstanding performance. Our iX turbomolecular pump range with integrated vacuum system controller provides many features that have, until now, only been available in costly external pump control units: forevacuum pumps, gauges, coolers, valves and many other accessories can now be easily controlled via the turbo pump. Designed to offer the best performance to size ratio in the ISO 63, 100 and 160 size range, TURBOVAC iX features a cutting edge rotor and drag stage design, leading to high performance and unparalleled speed especially for light gases....

Typical applications Analytical technologies/ Research & Development Mass spectrometry Electron microscopy Surface analysis X-ray analysis Particle accelerators and synchrotrons Laboratory coating systems MBE (Molecular Beam Epitaxy) UHV systems Life Sciences Proton therapy Gamma sterilization Production of high quality implants Industrial and coating applications PVD (Physical Vapour Deposition) - Optical coatings - CD/DVD/Blu-Ray disc production - Thin film technologies, photovoltaics Load locks, transfer chambers, handling systems Electron beam welders Insulation vacuum and leak detection

Performance you can rely on Thanks to its variable rotor and drag stage design, the new TURBOVAC iX line provides the right performance for many different processes: for UHV applications and compact pump system solutions, TURBOVAC iX is the perfect choice. With a light gas pumping speed of up to 60 % above current reference products and compression values around 100 times higher than previous generation products, TURBOVAC iX is especially suited to be operated with small backing pumps. Also when it comes to demanding process and high gas throughput applications, TURBOVAC T iX models deliver unequaled...

Countless options In order to reach the highest possible level of comfort for installation, operation TURBOVAC iX is equipped with a rotatable forevacuum flange connection and control, TURBOVAC iX offers an integrated electronic drive with 24/48 V DC supply as well as an integrated vacuum system controller for extended functions and pump system control. The vacuum system controller features USB and digital I/O interfaces and an additional Anybus port that can be equipped vacuum system control and a more than competitive alternative to costly with further interfaces available on the external control...

Performance Industry-leading pumping speed especially for light gases (up to 60 % higher than existing products) Optimized rotor diameter for ISO 63, 100 and 160 flanges to provide maximum pumping performance Flexibility Vacuum port design flexibility • Rotatable fore-vacuum port • Interstage port options Variable rotor and drag stage configurations for perfect match to application requirements Installation, operation and control Integrated 24/48V DC drive electronics to avoid expensive cabling Integrated vacuum system controller for plug & play pump system control • Standard USB and 15-pin digital...

Best performance for your investment Flexible performance adaptation – tailor-made to perfectly meet your requirements Outstanding performance for all applications thanks to innovative technology Easy installation, operation and control Plug & Play: integrated electronics and vacuum system controller, communication options and flexible accessories Installation in any orientation Increased productivity and system uptime at lowest cost Superior reliability due to innovative pump and bearing design Fit & Forget: first and only mechanical turbomolecular pump with oil-free hybrid bearing concept and...

Technical specifications TURBOVAC 90 iX High-vacuum pressure (mbar) High-vacuum pressure (mbar)

High-vacuum pressure (mbar) High-vacuum pressure (mbar)

Technical specifications Technical data High-vacuum connection Fore-vacuum connection Pumping speed for Compression ratio Ultimate pressure ISO-K/CF with 2-stage oil-sealed rotary vane pump Max. permissible fore-vacuum pressure for N2 Operating speed Cooling standard Cooling optional Weight ISO-K/CF Recommended fore-vacuum pumps Supply voltage Max. current consumption Max. power consumption Interfaces 240 USB, 15 pin digital I/O, Anybus Optional RS485, RS232, Profibus (additi

Technical data High-vacuum connection Forevacuum connection Pumping speed for Compression ratio Ultimate pressure ISO-K/CF with 2-stage oil-sealed rotary vane pump Max. permissible forevacuum pressure for N2 Operating speed Cooling standard Cooling optional Weight ISO-K/CF Recommended forevacuum pumps DIVAC Supply voltage Max. current consumption Max. power consumption 240 USB, 15 pin digital I/O, Anybus Optional RS485, RS232,

Order information For operating a TURBOVAC iX, a suitable forevacuum pump, a power supply as well as a DC/mains cable are mandatory. Further accessories might be required depending on the application and operating conditions. Pumps Part Number * High-vacuum flange High-vacuum flange ) Part Number * * all part numbers with USB+, 15 pin digital I/O and RS485 interface; other interfaces upon request. The LEYASSIST software for turbomolecular pumps is included as standard with TURBOVAC iX delivery. Accessories Power supply, cables and accessories 800100V0003 – TURBO.POWER integra incl. cable 0.3 m...