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TURBOVAC i

TURBOVAC i
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TURBOVAC i Turbomolecular Pumps 90 l/s - 450 l/s

A giant leap in vacuum performance! It has never been so easy to improve your processes until now. TURBOVAC 90-450 i will allow you to optimize pump down times and consistently hit your target in terms of pressures and gas ﬂows. Designed to offer the best performance/size ratio in the ISO 63, 100 and 160 size range, this product family features a cutting edge rotor and drag stage design resulting in high performance and unparalleled pumping speed, especially for light gases. Not only does the ﬂexibility of the rotor and drag stage design offer benchmark performance, it also ensures that the...

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Typical applications Analytical technologies/ Research & Development Mass spectrometry Electron microscopy Surface analysis X-ray analysis Particle accelerators and synchrotrons Laboratory coating systems MBE (Molecular Beam Epitaxy) UHV systems Life Sciences Proton therapy Gamma sterilization Production of high quality implants Industrial and coating applications PVD (Physical Vapour Deposition) - Optical coatings - CD/DVD/Blu-Ray disc production - Thin ﬁlm technologies, photovoltaics Load locks, transfer chambers, handling systems Electron beam welders Insulation vacuum and leak detection

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Performance you can rely on Thanks to its variable rotor and drag Superior reliability The unique oil free hybrid bearing stage design, the modern TURBOVAC i system is characterized by its extreme line provides the right performance for different processes: For UHV applications and compact pump system solutions, TURBOVAC 90 i, 250 i, 350 i and 450 i are the products of choice. With a light gas pumping speed of up to 60% above current reference products and compression reliability and durability. This is achieved by an integrated values around 100 times higher than stress and negative impact...

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Countless options The TURBOVAC i family offers numerous options to meet all of your application‘s requirements. All versions of the TURBOVAC i family are available with an additional interstage port that will allow you to pump down a second chamber. In order to reach the highest possible level of comfort during installation, operation and control, TURBOVAC i offers features such as a rotatable fore-vacuum ﬂange connection, an integrated electronic drive with 24/48V DC supply and an operator interface with USB, RS485 and digital I/O connections. Additional interface options are available on...

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Performance Industry-leading pumping speed especially for light gases (up to 60% higher than existing products) Optimized rotor diameter for ISO 63, 100 and 160 ﬂanges to provide maximum pumping performance Flexibility Vacuum port design ﬂexibility • Rotatable fore-vacuum port • Interstage port options Variable rotor and drag stage conﬁgurations for perfect match to application requirements Installation, operation and control Integrated 24/48V DC drive electronics to avoid expensive cabling Widest range of communication interfaces: USB, RS485 and remote 15 pin digital I/O as standard...

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Best performance for your investment Flexible performance adaptation – tailor-made to perfectly meet your requirements Outstanding performance for all applications thanks to innovative technology Easy installation, operation and control Plug & Play: integrated electronics, communication options and ﬂexible accessories Installation in any orientation Increased productivity and system uptime at lowest cost Superior reliability thanks to innovative pump and bearing design Fit & Forget: ﬁrst and only mechanical turbomolecular pump with oil-free bearing concept and maintenance-free ball bearings...

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Technical speciﬁcations TURBOVAC 250 i High-vacuum pressure (mbar) High-vacuum pressure (mbar)

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High-vacuum pressure (mbar) High-vacuum pressure (mbar)

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Technical speciﬁcations Technal data TURBOVAC High-vacuum connection Fore-vacuum connection Pumping speed for Compression ratio H2 Ultimate pressure ISO-K/CF with 2-stage oil-sealed rotary vane pump Max. permissible fore-vacuum pressure for N2 Operating speed Cooling standard Cooling optional Weight ISO-K/CF Recommended fore-vacuum pumps Supply voltage Max. current consumption Max. power consumption Interfaces

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Technical data TURBOVAC High-vacuum connection Fore-vacuum connection Pumping speed for Compression ratio H2 Ultimate pressure ISO-K/CF with 2-stage oil-sealed rotary vane pump Max. permissible fore-vacuum pressure for N2 Operating speed Cooling standard Cooling optional Weight ISO-K/CF Recommended fore-vacuum pumps DIVAC Supply voltage Max. current consumption Max. power consumption Interfaces

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Ordering Information For the operation of a TURBOVAC i, a suitable backing pump, a power supply and DC/mains cable are mandatory. Further accessories might be required depending on the application and operating conditions. Pumps Part Number * High-vacuum ﬂange High-vacuum ﬂange ) Part Number * *) all part numbers with RS485, USB+, 15 pin digital I/O; other interfaces upon request Power supply, cables and accessories 800100V0003 – TURBO.POWER integra incl. cable 0.3 m 800136V0007 – Air cooling radial TURBOVAC 90 i(X) 800096V0100 – Cable TURBOVAC i – TURBO.POWER integra, 1 m 800136V0009 – Air...

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