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Turbomolecular Pumps TURBOVAC SL

Turbomolecular Pumps TURBOVAC SL

Product catalog summary

Overview: The document introduces the TURBOVAC SL series of turbomolecular pumps by Oerlikon Leybold Vacuum, highlighting their advanced features and applications in various industries such as semiconductor, coating, analytical, and research sectors. The TURBOVAC SL series is noted for its compact design, improved vacuum performance, and flexibility in installation.

Key Features:

High flexibility in installation and communication, allowing mounting in any orientation.
Improved vacuum performance with excellent resistance to vibration due to mechanical bearings.
Oil-free operation for clean high and ultra-high vacuum environments.
Compatibility with low corrosive gases and a standardized accessories program.
Self-monitoring and diagnostics capabilities, with interface options including RS 232 C, RS 485 C, and ProfiBus.
Robust design suitable for industrial operation with a mean time between failures (MTBF) greater than 200,000 hours.

Applications: The TURBOVAC SL pumps are suitable for a wide range of applications including analytical instruments, mass spectrometers, electron beam microscopy, coating technologies, and ultra-high vacuum systems.

Product Variants: The TURBOVAC SL family includes models SL 80, SL 300, and SL 700, each offering different specifications to meet various application needs.

Technical Specifications:

Pumping speeds vary by model, with the SL 80 offering 65 l/s for N2, and the SL 700 offering 690 l/s for N2.
Ultimate pressure capabilities are less than 2 x 10^-10 mbar for the SL 80 and less than 10^-9 mbar for the SL 700.
Run-up times range from 1.5 to 5 minutes depending on the model.
Noise levels are maintained below 49 dB(A) across models.

Enhanced Services: Oerlikon Leybold Vacuum offers extensive customer support, including worldwide service networks, on-site support, and customer-care packages. They also provide consulting and training at strategic centers globally.

Ordering Information: The document provides detailed ordering information for various configurations and accessories, emphasizing the availability of a broad product portfolio and customization options.

Catalog excerpts

175.60.02 Turbomolecular Pumps TURBOVAC SL The New Premium Line.

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Oerlikon Leybold Vacuum has been a world leader in vacuum technology for over 150 years, helping our customers reach their big-picture goals by attending to the smallest details. Our broad range of advanced vacuum solutions is built on real-world experience and engineering expertise for use in manufacturing, analytical and research situations. The shape of our rotor blades, our unique ceramic ball bearings and our pumps’ ability to be mounted at any angle are all reasons why Oerlikon Leybold Vacuum provides the best performance in application- and customer-specific systems. We bring real-world...

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TURBOVAC SL - The Smart Line Our attention to detail ensures your success. Typical Applications The turbomolecular pumps from the TURBOVAC SL product family are designed to handle the most advanced and demanding applications and requirements in research and industry, including: n Analytical instruments n Leak detectors n Mass spectrometers n Gas chromatography (GC-MS) n Liquid chromatography (LC-MS) n Quadrupol time of flight (Q-TOF) n Matrix-assisted laser desorption time-of-flight (MALDI-TOF) n Inductively coupled plasma mass spectrometry (ICP-MS) n Electron beam microscopy n Coating technologies...

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The value of attention to detail. Outstanding flexibility: Up to 9 different on-board converter mounting positions are possible. Oerlikon Leybold Vacuum is one of the largest vendors of turbomolecular pumps worldwide. Our highly qualified scientists and engineers have hands-on experience in advanced vacuum applications and are dedicated to solving our customers’ vacuum challenges. We are constantly innovating and improving our entire range of solutions for industrial and research applications. With high manufacturing capacity and world-class production and quality assurance programs, as well...

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High Flexibility in Installation and Communication. The standardized accessories program TURBOVAC SL 80 SL 300 SL 700 Turbomolecular pump with mechnical rotor suspension n n n and compound stage Frequency converter TURBO.DRIVE with selectable interface types n n n Control unit TURBO.CONTROL n n n Power supply TURBO.POWER n n _ Mounting kit for TURBO.DRIVE q q q Purge gas valve q q q Venting valve q q q Mounting kit for purge/vent options q q q Air-cooling device q q l Water-cooling device q q l Splinter guard ISO-KF q q q Splinter guard CF q q q Power failure venting valve q q q Fine filter q...

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Headquarters Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne T +49 (0) 221-347-0 F +49 (0) 221-347-1250 [email protected] www.oerlikon.com/leyboldvacuum BICOM 10308/10459.02 175.60.02 2.3.12.09 GK Printed in Germany on chlorine-free bleached paper Technical alterations reserved TURBOVAC SL A New Generation of Turbomolecular Pumps. Turbomolecular Pump TURBOVAC SL 80 SL 300 SL 700 Inlet flange DN 63 ISO-K 63 CF 100 ISO-K 100 CF 160 ISO-K 160 CF Pumping speed N2 l/s 65 270 690 Ar l/s 60 260 630 H2 l/s 49 190 360 He l/s 55 255 580 Max. gas throughput with water cooling...

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Turbomolecular Pumps TURBOVAC SL

Turbomolecular Pumps TURBOVAC SL

Catalog excerpts

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