175.60.02 Turbomolecular Pumps TURBOVAC SL The New Premium Line.

Oerlikon Leybold Vacuum has been a world leader in vacuum technology for over 150 years, helping our customers reach their big-picture goals by attending to the smallest details. Our broad range of advanced vacuum solutions is built on real-world experience and engineering expertise for use in manufacturing, analytical and research situations. The shape of our rotor blades, our unique ceramic ball bearings and our pumps’ ability to be mounted at any angle are all reasons why Oerlikon Leybold Vacuum provides the best performance in application- and customer-specific systems. We bring real-world...

TURBOVAC SL - The Smart Line Our attention to detail ensures your success. Typical Applications The turbomolecular pumps from the TURBOVAC SL product family are designed to handle the most advanced and demanding applications and requirements in research and industry, including: n Analytical instruments n Leak detectors n Mass spectrometers n Gas chromatography (GC-MS) n Liquid chromatography (LC-MS) n Quadrupol time of flight (Q-TOF) n Matrix-assisted laser desorption time-of-flight (MALDI-TOF) n Inductively coupled plasma mass spectrometry (ICP-MS) n Electron beam microscopy n Coating technologies...

The value of attention to detail. Outstanding flexibility: Up to 9 different on-board converter mounting positions are possible. Oerlikon Leybold Vacuum is one of the largest vendors of turbomolecular pumps worldwide. Our highly qualified scientists and engineers have hands-on experience in advanced vacuum applications and are dedicated to solving our customers’ vacuum challenges. We are constantly innovating and improving our entire range of solutions for industrial and research applications. With high manufacturing capacity and world-class production and quality assurance programs, as well...

High Flexibility in Installation and Communication. The standardized accessories program TURBOVAC SL 80 SL 300 SL 700 Turbomolecular pump with mechnical rotor suspension n n n and compound stage Frequency converter TURBO.DRIVE with selectable interface types n n n Control unit TURBO.CONTROL n n n Power supply TURBO.POWER n n _ Mounting kit for TURBO.DRIVE q q q Purge gas valve q q q Venting valve q q q Mounting kit for purge/vent options q q q Air-cooling device q q l Water-cooling device q q l Splinter guard ISO-KF q q q Splinter guard CF q q q Power failure venting valve q q q Fine filter q...

Headquarters Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne T +49 (0) 221-347-0 F +49 (0) 221-347-1250 [email protected] www.oerlikon.com/leyboldvacuum BICOM 10308/10459.02 175.60.02 2.3.12.09 GK Printed in Germany on chlorine-free bleached paper Technical alterations reserved TURBOVAC SL A New Generation of Turbomolecular Pumps. Turbomolecular Pump TURBOVAC SL 80 SL 300 SL 700 Inlet flange DN 63 ISO-K 63 CF 100 ISO-K 100 CF 160 ISO-K 160 CF Pumping speed N2 l/s 65 270 690 Ar l/s 60 260 630 H2 l/s 49 190 360 He l/s 55 255 580 Max. gas throughput with water cooling...