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Turbomolecular Pumps MAG W 600

Turbomolecular Pumps MAG W 600

Product catalog summary

Introduction
The MAG W 600 is a wide-range turbomolecular pump with active magnetic suspension and an integrated controller, designed by Oerlikon Leybold Vacuum. It is tailored for the analytical, research, semiconductor, and coating industries, leveraging over 30 years of experience with MAGLEV pumps.

Design Features

Installation possible in any orientation.
High vacuum connections available in DN 160 or 200 ISO-K and CF.
Fore-vacuum connection via DN 25 KF with clamp shoe.
Purge/vent port via DN 16 KF clamp shoe.
Optional water or air cooling systems.
Compliance with CE, RoHS, and UL standards.
Two slots for industrial communication modules, with standard 9-pin 24 V SPS(PLC)-IO and optional interfaces like Ethernet, ProfiBus, DeviceNet, RS232/RS485.

Customer Benefits

High pumping speed with a minimal footprint.
Maintenance-free system setting new benchmarks.
Suitable for applications such as analytical, thin film deposition, and R&D.
Modular design offering flexibility, with a bench-top controller option available from August 2007.

Features at a Glance

New 5-axis magnetic bearing and drive system for reliability and efficiency with low vibration and noise.
Robust performance with high pumping speeds and compression ratios for all gases.
Integrated converter for bearing and drive system, eliminating the need for a conventional controller and cables.
Innovative communication concept for easy integration into customer equipment.
Compact, space-saving design for easy system integration.

Technical Data

Parameter	MAG W 600	MAG W 700
Inlet flange	DN 160	200
Pumping speed (N2)	600 l/s	On request
Pumping speed (H2)	380 l/s	On request
Pumping speed (He)	540 l/s	On request
Compression (N2)	2.0 x 10⁹	-
Compression (H2)	3.2 x 10³	-
Compression (He)	9.2 x 10⁴	-
Max. fore-vacuum pressure	6 mbar	-
Weight	17 kg	-

Ordering Information

High vacuum flange size: DN 160 (ISO-K P/N 410600V0505, CF P/N 410600V0506), DN 200 (ISO-K P/N 410700V0505, CF P/N 410700V0506).
Power supply: TURBO.POWER 500 (P/N 410300V0221).
Water cooling device: P/N 410600V0101.
Air cooling device: P/N 410600V0102.
DC cable (5 m): P/N 410300V2005.
Additional cables and accessories available upon request.

Catalog excerpts

Headquarter Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne T +49 (0) 221-347-0 F +49 (0) 221-347-1250 [email protected] www.oerlikon.com DN 160 or 200 ISO-K and CF high vacuum connection DN 25 KF with clamp shoe fore-vacuum connection DN 16 KF clamp shoe purge / vent port Optional water or air cooling CE and RoHS conform; UL fulfilled Two slots for industrial communication modules - Standard 9-pin 24 V SPS(PLC)-IO - Optional interfaces possible: Ethernet, ProfiBus, DeviceNet, RS232 / RS485 turbomolecular pumps with integrated electronics, the 5-axis magnetically...

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