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Leybold
Turbomolecular Pumps MAG W 300

Turbomolecular Pumps MAG W 300

Product catalog summary

Overview
The MAG W 300 is a wide-range turbomolecular pump with active magnetic suspension and an integrated controller, designed by Oerlikon Leybold Vacuum. It is tailored for the analytical and research market, as well as the semiconductor and coating industries.

Design Details

Can be installed in any orientation.
Available with DN 100 or 160 ISO-K and CF high vacuum connections.
Includes DN 16 KF fore-vacuum connection with clamp shoe.
Features purge/vent port and optional water or air cooling.
Complies with CE and RoHS standards; UL fulfilled.
Equipped with two slots for industrial communication modules, supporting interfaces like Ethernet, ProfiBus, DeviceNet, RS232/RS485.

Customer Benefits

Offers highest pumping speed with a minimal footprint.
Sets new benchmarks for maintenance-free systems.
Suitable for vibration-sensitive applications such as analytical and electron microscopy, thin film deposition, and R&D.
Modular design allows flexibility; controller available as a bench-top unit.

Features at a Glance

New 5-axis magnetic bearing and drive system for reliability and efficiency with low vibration and noise.
Robust performance with high pumping speeds and compression ratios for all gases.
Integrated converter for bearing and drive system, eliminating the need for a conventional controller and cables.
Innovative communication concept for easy integration into customer equipment.
Compact, space-saving design for easy system integration.

Technical Data

Parameter	MAG W 300	MAG W 400
Inlet flange	DN 100	DN 160
Pumping speed (N2)	300 l/s	365 l/s
Pumping speed (H2)	190 l/s	200 l/s
Pumping speed (He)	260 l/s	290 l/s
Compression (N2)	2.0 x 10⁹	-
Compression (H2)	3.2 x 10³	-
Compression (He)	9.2 x 10⁴	-
Max. fore-vacuum pressure	8 mbar	-
Weight	12 kg	-

Ordering Information

High vacuum flange size: DN 100 (ISO-K P/N 410300V0505, CF P/N 410300V0506), DN 160 (ISO-K P/N 410400V0505, CF P/N 410400V0506).
Power supply: TURBO.POWER 500 (P/N 410300V0221).
Cooling devices: Water (P/N 410300V0101), Air (P/N 410300V0102).
DC cable (5 m): P/N 410300V2005.
Additional cables and accessories available upon request.

Catalog excerpts

Headquarter Germany Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D-50968 Cologne T +49 (0) 221-347-0 F +49 (0) 221-347-1250 [email protected] www.oerlikon.com DN 100 or 160 ISO-K and CF high vacuum connection DN 16 KF with clamp shoe fore-vacuum connection Purge / vent port Optional water or air cooling CE and RoHS conform; UL fulfilled Two slots for industrial communication modules - Standard 9-pin 24 V SPS(PLC)-IO - Optional interfaces possible: Ethernet, ProfiBus, DeviceNet, RS232 / RS485 pumps with integrated electronics the new 5-axis magnetically levitated MAG W 300i fulfills...

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