TURBOVAC MAG DIGITAL Magnetically levitated Turbomolecular Pumps for Harsh Semiconductor Applications

MAG DIGITAL Most reliable product line for industrial and harsh semiconductor applications The High Vacuum Technology Experts MAG DIGITAL Turbomolecular Pumps As a vacuum technology pioneer, Leybold has a broad spectrum of innovative vacuum components. With the market introduction of the first magnetically levitated turbomolecular pumps worldwide in the year 1975 and the long success story of the TURBOVAC TMP 340 M, Leybold presents itself as a specialist for lowvibration turbomolecular pumps. Based on many decades of our engineering and application expertise we develop and manufacture solutions...

The Benchmark for Maintenance-free Systems Customized rotor design for specific applications Maximum performance by use of intelligent power control system (PCS) No tuning - no matched sets of pump, cables, and controller Rugged Design The turbomolecular pumps from the MAG DIGITAL line withstand typical accidents and events occuring in an industrial environment. I Self protection under overload conditions Robust design of emergency shut-down bearings for safe pump run-down Broad product range comprising components, accessories and services - all from a single source Vacuum engineering and design...

Technical Data Ordering information TURBOVAC MAG W (C/CT) with separate Frequency Converter and Compound Stage DN ISO-F DN CF Electronic frequency converter MAG.DRIVE digital MAG.DRIVE digital, Profibus MAG.DRIVE digital, RS 232 C interface Pumping speed N2 Ar He H2 Compression, max. N2 Ultimate pressure Ordering Information* Plug-in control Connecting cable converter – pump 01.5 m (5.25 ft) DRIVE/BEARING 01.5 m (5.25 ft) TMS 05.0 m (17.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) TMS 10.0 m (35.0 ft) DRIVE/BEARING 10.0 m (35.0 ft) TMS Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440...