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MAG digiLine

MAG digiLine

Product catalog summary

Overview
The TURBOVAC MAG DIGITAL series by Leybold represents a line of magnetically levitated turbomolecular pumps designed for harsh semiconductor applications. These pumps are known for their reliability, low vibration, and noise-less operation, making them ideal for industrial and semiconductor processes.

Key Features

Low vibration and noise-less drive for reliability and efficiency.
High pumping speed and compression rates for various process gases.
Maintenance-free with high resistance to corrosive gases and particles.
Patented KEPLA coating to prevent corrosion.
Integrated purge valve and temperature management system (TMS) for optimal performance.

Applications

Industrial coating systems.
Semiconductor processes including Etch, CVD, PVD, and Ion Implantation.
Suitable for particle accelerators and research applications.

Product Range
The MAG DIGITAL pumps are available in various models, including MAG W 830 C, MAG W 1300 C, MAG W 2000 C/CT, MAG W 2200 C/CT, MAG W 2800 C/CT, and MAG W 3200 C/CT. Each model offers different specifications to meet diverse application needs.

Technical Specifications

Pumping speeds range from 1760 to 3200 l/s for N2, with similar variations for other gases like Ar, He, and H2.
Ultimate pressure is less than 10^-8 mbar.
Weight varies by model, with the MAG W 2000 C/CT weighing 68 kg.

Design and Performance

Installation in any orientation with a customized rotor design.
Intelligent power control system for maximum performance.
Automatic compensation of rotor unbalance and storage of operation parameters.

Additional Features

Shock-vent proof and self-protection under overload conditions.
Generator mode in case of power failures.
Worldwide sales and service network with comprehensive application support.

Ordering Information
Detailed ordering information is available for each model, including electronic frequency converters and connecting cables. For complete specifications, refer to the Leybold full line catalog.

Catalog excerpts

TURBOVAC MAG DIGITAL Magnetically levitated Turbomolecular Pumps for Harsh Semiconductor Applications

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MAG DIGITAL Most reliable product line for industrial and harsh semiconductor applications The High Vacuum Technology Experts MAG DIGITAL Turbomolecular Pumps As a vacuum technology pioneer, Leybold has a broad spectrum of innovative vacuum components. With the market introduction of the first magnetically levitated turbomolecular pumps worldwide in the year 1975 and the long success story of the TURBOVAC TMP 340 M, Leybold presents itself as a specialist for lowvibration turbomolecular pumps. Based on many decades of our engineering and application expertise we develop and manufacture solutions...

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The Benchmark for Maintenance-free Systems Customized rotor design for specific applications Maximum performance by use of intelligent power control system (PCS) No tuning - no matched sets of pump, cables, and controller Rugged Design The turbomolecular pumps from the MAG DIGITAL line withstand typical accidents and events occuring in an industrial environment. I Self protection under overload conditions Robust design of emergency shut-down bearings for safe pump run-down Broad product range comprising components, accessories and services - all from a single source Vacuum engineering and design...

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Technical Data Ordering information TURBOVAC MAG W (C/CT) with separate Frequency Converter and Compound Stage DN ISO-F DN CF Electronic frequency converter MAG.DRIVE digital MAG.DRIVE digital, Profibus MAG.DRIVE digital, RS 232 C interface Pumping speed N2 Ar He H2 Compression, max. N2 Ultimate pressure Ordering Information* Plug-in control Connecting cable converter – pump 01.5 m (5.25 ft) DRIVE/BEARING 01.5 m (5.25 ft) TMS 05.0 m (17.5 ft) DRIVE/BEARING 05.0 m (17.5 ft) TMS 10.0 m (35.0 ft) DRIVE/BEARING 10.0 m (35.0 ft) TMS Forevacuum pump TRIVAC D 65 B 3 phase motor; 230/400 V, 50 Hz / 250/440...

Open the catalog to page 4

MAG digiLine

MAG digiLine

Catalog excerpts

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