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Flat Panel Display
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Innovative Vacuum Solutions for Flat Panel Display

Vacuum Solutions for DRYVAC SYSTEMS – THE LEYBOLD STANDARD for Flat Panel Display Quality Our product quality and knowhow ensures your sustainable success in vacuum With our DRYVAC SYSTEM platform we offer innovative solutions based on our DRYVAC dry screw pumps in combination with RUVAC WH booster pumps. These systems cover a large variety of Flat Panel Display application in the production of LCD and OLED displays. Performence High capacity dry pumps and dry booster pumps are our focus We offer standardised ergonomics – easy to install, easy to use. Total cost of ownership We offer the...

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Challenging Requirements DS 2545 U / DS 2565 U Trust a pump with experience These systems are designed for load lock and transfer applications. Their performance and reliability is proven by a large installed base in the flat panel display market. DS 2545 F / DS 2565 F Dry fore-vacuum pump systems for transfer chambers, VCD (DS 2565) and process applications such as thin film encapsulation ALD and PECVD (DS 2565C-F). DS 4465 U Get the number one in load lock These system is especially designed for load lock. By combining large capacity, high performance dry pump technologies we offer the...

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No matter what the display market future holds ... ... you can rest assured that we will face all upcoming market challenges, always continue to be a key enabler in display manufacturing processes.

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Leybold offers a broad line of vacuum pumps and accessories, enabling the selection of optimum pump systems for flat panel display applications.

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Innovative Vacuum TFT Backplane PECVD PECVD Process 2 Process 1 Load lock Transfer Transfer DS 2565-U Load lock Load lock vacuum equipment TFT Sputter vacuum equipment Load lock Transfer PECVD vacuum equipment Load lock Transfer PECVD vacuum equipment DS 7050C-F Process Load DS 4465-U lock Transfer TFT Sputter vacuum equipment Load lock Transfer

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Solutions for Flat Panel Display Color Filter Sputter PR Coater Process 1 Transfer Load lock CF Sputter vacuum equipment Load lock Transfer CF Sputter vacuum equipment

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Production Processes OLED Encapsulation Evaporation vacuum equipment Load lock Thin Film Encapsulation PECVD vacuum equipment Load lock Evaporation vacuum equipment Load lock Evaporation vacuum equipment PECVD vacuum equipment Load lock Load lock Load lock Load lock Load lock Encapsulation vacuum equipment Aging vacuum equipment Load lock Aging vacuum equipment Load lock Evaporation vacuum equipment 4465-U DS 2565-U DS Encapsulation vacuum equipment Aging vacuum equipment Load lock Transfer Encapsulation vacuum equipment Load lock PECVD vacuum equipment Load lock Transfer PECVD vacuum...

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Cell Lamination Lamination vacuum equipment Process

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Flat panel displays for TVs, Numerous production steps under vacuum conditions require vacuum systems with highest reliability, quality and optimized cost of ownership. Efficient solutions The Leybold team of vacuum specialists developed pumping simulation and designing programs to provide the optimized vacuum solution for your project and processes. Continuous improvement drives our innovation program in order to enhance pumping performance and minimize utility costs. For choosing the optimal pump design, parameter such as demanding engineering requirements, safety aspects, reliability,...

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tablets and smartphones are parts of our daily life Service nearby, worldwide Leybold offers an extensive global network of sales and service companies as well as representations. Thanks to this network, we not only ensure a direct and close contact to our customers achieving global quality standards. DRYVAC SYSTEM Technical Data Pumping Speed Whether you are an end-user of our products or an OEM – vacuum technology is either system integrated or needs to be maintained in your installed base. We also offer customized service solutions and contracts to meet your specific needs. Noice Level...

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Full line vacuum solutions Helium leak detectors Designed for the requirements of industrial series production. Well-proven and easy to use in production and quality control programs. Turbomolecular pumps TURBOVAC line with mechanical rotor suspension, TURBOVAC MAG line with magnetic rotor suspension and the TUBOVAC i series with hybrid rotor suspension. All products must pass an extended qualification program with strict toll gates before they are released into the market. For all serial products we have a continuous improvement program in place. Hydrocarbon-free high-vacuum generation...

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