COOLVAC Refrigerator Cryopumps and Systems

E NG I NE E R IN G In the development and optimization of new a ­ pplications there is an increasing requirement for custom vacuum system solutions. ­Applications ■■ UHV systems ■■ Load lock chambers ■■ Beam tubes of particle accelerators ■■ General research ■■ Metallization systems ■■ Evaporation systems ■■ Electron beam welding systems ■■ Space simulation chambers Most of the known applications are covered by our standard cryopump systems from the iClassicLine and the BasicLine. However, in the development and optimization of new applications in research or industry (MBE, space simulation)...

COOLVAC Cryopumps Leybold fulfils the rapidly increasing requirements for cryopump systems with its “smart” family of cryogenic pumps – adapted to current and future economic trends and cycles. We have combined a smart controller which is easy to operate for rapid, reliable and clean regeneration with high performance, low vibration and efficient cold heads and compressors. High quality, high reliability and impressive performance data are guaranteed and confirmed by our customers through current installations. Single, Double, iClassicLine Cryopumps The “iClassicLine” cryopumps have been prepared...

with Smart Technology BasicLine Cryopumps “BasicLine” cryopumps are equipped only with a temperature sensor (Si diode) at the second stage. However, the dimensions and the vacuum performance data are identical to the iClassicLine cryopumps. or Multiple Systems ... up to 30 Cryopumps! System Components ■■ Cryopumps ■■ Compressors ■■ Flexible helium lines ■■ Interconnection cables ■■ COOL.DRIVE controller ■■ CRYOVISION display Depending on the the application, single, double and multiple systems with up to 30 cryopumps per CRYOVISION can be built from these compone

Compressors and Accessories Control / Visualization COOL.DRIVE Controller COOL.DRIVE controller COOLPAK Compressors The COOLPAK compressor units have been proven to drive cold heads and cryo pumps absolutely reliable and cost-effective. ■■ COOLPAK 2000/2200 for single operation of COOLVAC pumps up to 3000 l/s 6000 H/6200 H for single and multiple operation of up to three cryopumps ■■ 24 VDC and RS 232 interfaces ■■ LCD display for displaying the operating status and messages The COOL.DRIVE Controller ■■ controls and monitors the cryopump via the integrated 24 VDC or RS 232 interface ■■ provides...

COOLVAC Technical Data COOLVAC iCL “iClassicLine” Forevacuum flange High vacuum (HV) flange Built-in cold head COOLPOWER Crossover value Maximum volume flow rate mbar·l·s-1 Weight iClassicLine models BasicLine models All measurements in accordance with PNEUROP+ BICOM 12890.13810.01 182.50.02 2.2.08.16 mzs Printed in Germany on chlorine-free bleached paper Technical alter