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COMBIVAC Series

COMBIVAC Series

Product catalog summary

Overview: The COMBIVAC Series Controllers are designed for passive sensors used in demanding industrial and research applications. They provide monitoring and control across a vacuum pressure range from 10^-12 to 1000 mbar.

Specifications:

Compact three-channel measuring instruments for passive sensors.
Automatic switchover and high voltage control between THERMOVAC, PENNING, and IONIVAC sensors.
Connection of adjusted, temperature-compensated THERMOVAC sensors and rugged PENNING or IONIVAC vacuum gauge heads.
High sensor reliability and cost-effective replacement options.
Error messaging per channel for issues like broken filaments or defective sensors.
RS 232/485 and Profibus interfaces, CE and RoHS compliant.

Technical Data:

Display range for THERMOVAC: 0.5 · 10^-3 - 1000 mbar.
Display range for PENNINGVAC: 1 · 10^-9 - 10^-2 mbar.
Display range for IONIVAC: 2 · 10^-12 - 1 · 10^-4 mbar.
Adjustable switching thresholds for THERMOVAC: 5 · 10^-3 - 500 mbar.
Dimensions: 106.4 x 128.5 x 164.5 mm, Protection class: IP 40.

Applications:

Process industry: Suitable for rough or corrosive conditions and universal monitoring of high vacuum pump systems.
Research applications: Ideal for particle accelerators, surface analysis, tunnel microscopy, and molecular beam epitaxy.

Connectable Sensors:

THERMOVAC models: TR 211 to TR 216.
PENNINGVAC models (CM 51): PR 25 to PR 28, bakeable to 200 °C.
IONIVAC models (CM 52): IE 414 and IE 514, bakeable to 350 °C.

Ordering Information: COMBIVAC controllers are available with EURO and US mains connection cables and interfaces. For detailed information, refer to the full line catalog or contact Leybold GmbH.

Catalog excerpts

COMBIVAC Series Controller for passive sensors in demanding industrial and research applications Measuring range: 1x10 s9 - 1000 mbar Measuring range: 1x10-12 - 1000 mbar

Open the catalog to page 1

COMBIVAC controller with EURO and US mains connection cable (2 m) and interfaces: RS 232 C/485 // or Profibus Cat. No. 230 110 // 230 111 For detailed information please refer to our full line catalog or contact us. By combining two principles of measurement (THERMOVAC and PENNINGVAC) the COMBIVAC CM 51 performs vacuum pressure measurements and control within the entire range of 10-9 and 1000 mbar. The COMBIVAC 52 covers the entire range of vacuum pressures from 10-12 to 1000 mbar by combining two UHV principles of measurement (THERMOVAC and IONIVAC). Customer Benefits ■ Compact three channel...

Open the catalog to page 2

COMBIVAC Series

COMBIVAC Series

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