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LEONI AG
Group: LEONI
Catalog excerpts
Optical switch integrated pattern defect detection system for semiconductor manufacturing RtwfSwHcb FiberSwitch Light Switching for Optical Systems Fiber Optics I www.leoni-fiber-optics.com Detecting pattern defects in semiconductor wafers with integrated 2xN optical switch In the semiconductor manufacturing process, optics is applied to find pattern defects. A pattern defect can be detected by comparing the pattern images of each die (integrated circuit). By integrating LEONI 2xN optical switches can be downsized and the throughput can be enhanced. LEONI optical switches will be applicable to some enhanced configurations, such as a multiple light source system. LEONI supplies various types of 1xN and 2xN single- & multimode switches, i.e. LargeCore fibers up to 800 pm, PM, UV-VIS, VIS-IR and broadband. As an OEM service partner we can also easily integrate the switch into the final measuring system. LEONI Business Unit Fiber Optics • Phone +49 36764 81-100 • fiber-optics@leoni.com • www.leoni-fiber-optics.com
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