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Mass flow Meters and Controllers

Mass flow Meters and Controllers
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Mass Flow Meters and Controllers

Corporate Headquarters of the Leister Group, Switzerland About Axetris AG Axetris AG, a company of the Leister group, is serving OEM customers with micro technology based (MEMS) infrared light sources, laser gas sensors, mass flow sensors and controllers and micro-optical components used in industrial, process control, environmental, medical automotive and telecom applications. Axetris supports its customers in many industries with in-depth application know-how. Our engineering and manufacturing teams combine broad experience in simulation, design, manufacturing and metrology from microchip...

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High Performance Ultra Compact Mass Flow Meters and Controllers for OEM Applications Complete range From ultra compact mass flow meters and controllers for single gases up to highly integrated customized manifold units for measuring and controlling multiple gases, the new Axetris MFM / MFC 2000 product range is suited for a wide range of applications. The modular design and broad range enables seamless integration of the newest flow sensing and control technology into your products. High accuracy and short reaction time The high accuracy and short reaction time open new possibilities for...

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Mass Flow Meter and Controllers Controllers Meters Custom Systems MFM 2020 MFM 2021 MFC 2022 MFY 20000 Series MFM 2100 Series MFC 2100 Series MFY 21000 Series Note: Typical pictures are shown only. For the actual design variant and availability contact Axetris. Customized gas mixing and blending systems By integrating several mass flow meter, pressure sensor and controller modules into one common manifold, Axetris can build highly compact, customer specific systems exactly meeting your needs. In contrast to conventional manifolds using standard mass flow controllers an integrated manifold...

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Standard Product Range Output • • • 24 V Stand - alone digital meter - RS485 MFM 2140 • MFM 2021 • • • MFC 2022 • • • • MFC 2122 • • • • • • • • • • MFC 2132 MFC 2142 • Valve • • Stand-Alone Stand - alone digital meter - RS232, 4…20mA • Compact Module 24 V • MFM 2130 Digital • • Analog • • Digital • • MFM 2120 4…20 mA 24 V • 0…5 V • • 0…5 V • Digital DC Voltage 12 V Digital 4…20 mA 0…5 V Meter Valve override Main application / Remarks Supply • MFM 2020 Controller Set point Functionality Multi Gas/ Multi Range PID Control Temp. Signal Flow Meter with PID Output Input Valve driver Type • • 12...

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Specifications Specifications Gas Flow range Gas Calibration conditions Standard1) Standard cubic centimeter per minute Number of ranges Non corrosive Number of gases sccm 20, 50, 250, 3000 sccm (N2 equivalent) up to 8 e.g. N2, O2, Air, CO2, Ar, He, H2 up to 8 Reference conditions: t = 0°C, P = 1013 mbar absolute As an option user defined standard conditions (uccm) are available on request Accuracy2) Pressure coefficient Long term stability Response time Settling time Operating Conditions Temperature Humidity Pressure range N2, 25°C, 1 bar: ≤ 0.2 % F.S. for 0...10% F.S. ≤ 1 % O.R. for...

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Benefits • MEMS technology The entire MFM / MFC product range is based on the proprietary Axetris mass flow sensor chip designed and manufactured in our own class 100 clean rooms in Switzerland. • Multi-gas / multi-range capability The built-in multi-gas / multi-range capability allow to switch between different gases and measuring ranges. • High accuracy and long-term stability by platinium technology The micro machined chips from Axetris contain highly stable platinum resistors combined with a platinum heater. This guarantees an industry leading accuracy and long-term stability....

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Mass Flow F50/11.2008/ 01.2012/Art. Nr. 602.285 www.axetris.com Contact Headquarters: Axetris AG, Switzerland Schwarzenbergstrasse 10 CH-6056 Kaegiswil Switzerland phone: +41 41 662 76 76 fax: +41 41 662 75 25 axetris@axetris.com www.axetris.com USA: Leister Technologies LLC 1275 Hamilton Parkway Itasca, IL 60143 USA phone: +1 630 760 1000 fax: +1 630 760 1001 axetris@leisterusa.com www.axetris.com Swiss Made Quality. Axetris is an ISO 9001 certified enterprise. China: Leister Technologies Ltd. Building A, 1588 Zhuanxing Road Shanghai 201 108 China phone: +86 21 6442 2398 fax: +86 21 6442...

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