DSM 9B HIGH PRODUCTION Double-Side LAPPING MACHINE MACHINE FEATURES Hardware • 4-Way Motion • Positive Flatness Control • Variable Speed Control • Multi-motor control (up to 4) • Pressure Control System • Geared Carriers • Automatic Thickness Control Flatness Control SpeedFam-LAPMASTER DSM 9B The Double-Side Machine DSM 9B is an exceptionally precise, finishing or semi-finishing system capable of lapping, grinding, diamond or soft polishing both sides of a work piece simultaneously. DSM 9B is versatile enough to handle traditional metalworking requirements as well as the processing of thin, fragile, semiconductor and optical materials. DSM is a machining process during which work pieces are placed between upper and lower rotating plates. In the soft polishing process, special polishing pads are mounted on the plate surfaces for the desired finish. The key to the quality, speed and versatility of the SPEEDFAM-LAPMASTER Double-Side Machine involves a principle known as the 4-Way Motion. How 4-Way Motion is achieved: Parts are captured in carriers in a manner that allows them to conform to various aspects of the 4-way system including: • Rotational speed and direction of the lower and upper plates in relation to the carriers (1 and 2). • Rotating / orbital motion of the carrier in relation to the speeds and directions of the lower and upper plates. Motion is always in the direction of the lower plate (3). • Axial spin motion of the carrier in relationship to the speeds and directions of the lower and upper plates (4). Utility of the 4-Way Motion reduces machining time, surpassing the 2-way and 3-way capabilities of other double-sided machines. Software • Touch Screen control system on a swing arm pendant • Security access levels • Detailed graphics with display of process parameters • PLC control of all major functions • Modem connection available • Interlock system Touch Screen Control System Other Features • Easy to access, low maintenace design

DSM 9B – HIGH PRODUCTION Double-Side LAPPING MACHINE TECHNICAL DATA Hardware • 4-Way Motion: Upper and lower lapping plates and carrier rotations are pre-programmed, allowing both sides of the work piece to be processed with desired material removal amounts. This results in superior part flatness and parallelism while reducing machining stress to work piece and carrier. • Positive Flatness Control: Lapping plates experience less wear and have a more consistent spherical flatness that can be manipulated by changing the axial spin direction of the carrier. Plate flatness conditioning takes place...