Valves
44Pages

Valves In This Section Technical Notes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2 to 2-5 Gate Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6 to 2-23 Standard (SS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6 to 2-11 Standard (Al). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12 to 2-15 Million Cycle Gate Valves (SS) . . . . . . . . . . . . . . . . 2-16 to 2-17 3-Position Gate Valves (SS). . . . . . . . . . . . . . . . . . . 2-18 to 2-19 Throttle Gate Valves (SS) . . . . . . . . . . . . . . . . . . . . 2-20 to 2-21 Semiconductor Processing Valves (SS & Al). . . . . . 2-22 to 2-23 Angle Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24 to 2-29 Bellows Sealed Angle Valves (SS). . . . . . . . . . . . . . 2-24 to 2-27 Bellows Sealed Angle Valves (Al). . . . . . . . . . . . . . . . . . . . . 2-28 Angles Blocked Valves (Al). . . . . . . . . . . . . . . . . . . . . . . . . . 2-29 Inline Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30 to 2-31 Bellows Sealed Inline Valves (SS). . . . . . . . . . . . . . 2-30 to 2-31 All Metal Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32 to 2-33 Angled Valves (SS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-32 Leak Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-33 Butterfly Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34 to 2-35 Standard (SS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-34 Standard (Al) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35 Soft Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-35 Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-36 Manual Ball Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-36 Conductance Control Valves . . . . . . . . . . . . . . . . . . 2-37 to 2-39 Butterfly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-37 to 2-38 Multivane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-39 Diaphragm Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-40 Aluminum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-40 Vent Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-41 Auto Off Safety Vent Valves . . . . . . . . . . . . . . . . . . . . . . . . . 2-41 Water Valves and Accessories. . . . . . . . . . . . . . . . . 2-42 to 2-43 Shut off Valve and Manifolds . . . . . . . . . . . . . . . . . . . . . . . . 2-42 Water Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-43 Gas Valves and Accessories . . . . . . . . . . . . . . . . . . 2-44 to 2-45 Shut off and Metering Valves . . . . . . . . . . . . . . . . . . . . . . . . 2-44 Metering, Needles, UTA, & Leak Valves . . . . . . . . . . . . . . . 2-45

Technical Notes ➤ Vacuum Valves The three main functions of vacuum valves. • Isolate vacuum volumes from pumps • Control gas flow to achieve a particular pressure • Enable transfer of objects between vacuum volumes Actuation To move the flapper, a rotary or linear motion is transmitted from air-side to vacuum-side through a seal. Both the part that moves the flapper and the mechanism that causes movement are called the actuator. Actuators are driven by manual hand-wheel or levers, electro-magnetic actuators, motors, or pneumatic cylinders. A valve’s main design characteristics depend on...

Technical Notes ➤ Vacuum Valves Sealing the Actuator A rotating actuator is often sealed by a dynamic o-ring seal compressed around the shaft. Occasionally, they are used for linear actuators but the greater risk of gas burst makes them less popular than other linear seals. Most dynamic o-ring actuator seals are satisfactory for rough and the (mid) high vacuum pressure range. The rubber diaphragm described earlier is its own seal since the air-side actuator does not penetrate into the vacuum but simply pushes the diaphragm. In a similar way, the corrugated metal diaphragms, sealing...

Technical Notes ä Vacuum Valves n Angle Valves The angle valve’s applications include rough pumping shut-off, foreline switching between pumps, cryo-sorption pump shut-off, isolating foreline traps, UHV shut-off, sorption trap isolation, isolating sections baked to high temperature, and more. As the name implies, the valve’s ports are at 90º with the flapper’s motion along the axis of one port. Although large-diameter angle valves (often called poppet valves) exist, the most popular sizes have ports between 3/4" and 3". Their right angle construction reduces the gas conductance for a given...

Technical Notes n Butterfly Valves Butterfly valves are available in a range of sizes—large enough to isolate diffusion pumps and small enough for many foreline applications. A popular application is as a down-stream conductance controller to maintain a constant chamber pressure in processes requiring gas flow. A major application for this valve is down-stream conductance control. Two types are used, the first with the o-ring (as described above) and the second without an o-ring. Without an o-ring, the valve has a known, fixed, minimum conductance when fully closed. With an o-ring, the...

Gate Valves n CF Flanged Standard Gate Valves with Fluorocarbon Bonnet Seals IN THIS SECTION Kurt J. Lesker Co. Standard Gate Valve Kurt J. Lesker Company’s stainless steel standard gate valves are reliable, economical, general-purpose components for HV applications that require cleanliness and corrosion resistance. • General purpose Electropolished Stainless Steel • Provide high conductance with a compact design • Shock-free operation with minimum vibration • Available in manual or pneumatic operation • Pneumatic valves stay closed in the event of power loss or loss of air pressure •...