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TORUS® Linear Magnetrons

TORUS® Linear Magnetrons

TORUS® Linear Magnetrons

Product catalog summary
Overview
The document provides detailed information about TORUS® Linear Magnetrons, highlighting their applications, features, options, and specifications. These magnetrons are used in various industries such as automotive, architectural glass, photovoltaics, superconductors, and more.

Applications
The magnetrons are applicable in diverse fields including automotive, architectural glass, photovoltaics, superconductors, tool coating, wear coating, flat panel displays, lighting, OLED/PLEDs, medical, web coating, aerospace, decorative, nanotechnology, and optical industries.

Features
- Over 30 years of experience in the field.
- Available in standard 3.5'' and 5'' wide designs.
- Options for direct and indirect-cooled targets.
- Internal and external mounting capabilities.
- Standard and high field magnet arrays with balanced and unbalanced options.
- Quick target change facilitated by slotted clamps and shields.
- Drop-down anode assembly for easy maintenance.
- SAE and metric hardware options.
- Global sales and technical support.
- 1-year warranty on all products.

Options
- Angular Flex Stem and Right Angle Stem.
- Deposition Chimney and Gas Ring.
- High Strength Magnets and Shutters.
- Cluster Assemblies.

Specifications
- Magnet Assembly: Utilizes high strength, rare earth NdFeB (Neodymium Iron Boride).
- Temperature Rating: Up to 110º C.
- Power Rating: DC: 100 watts/in² (Indirect-Cooled), 250 watts/in² (Direct Cooled); RF: 1/3 DC power.
- Operating Pressure: Typically ranges from 1-50 mTorr.
- Target Cross-Sections: Standard options of 3.5'' and 5'' with custom options available.
- Target Lengths: Up to 4 meters.
- Target Utilization: Typically around 40% with non-magnetic materials in a non-reactive mode.
- Uniformity: Typically within ±3%-5% range.
- Drop-Down Anode Walls: Allows quick and easy target change without removing anode shields.
- Cooling: Options for direct and indirect-cooled targets.
- Worldwide Technical Support: Available from headquarters in the USA, Canada, UK, and China.
- Warranty: All products are covered by a 1-year warranty.

Note: The specifications and test data provided by Kurt J. Lesker Company (KJLC) cannot be copied, reproduced, or referenced without express written permission from KJLC.
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Catalog excerpts

TORUS® Linear Magnetrons-1

TORUS® Linear Magnetrons Applications • Medical • Web coating • Aerospace • Wear coatings • Decorative • Photovoltaics • Nanotechnology • Optical • Automotive • Architectural Glass • Photovoltaics • Superconductors • Tool Coating • Wear Coating • Flat Panel displays • Lighting • OLED/ PLED's Features • 30+ years experience • Standard 3.5" and 5" wide designs • Direct and Indirect-cooled target options • Internal and External mounting • Standard and High Field magnet arrays • Balanced and Unbalanced magnet options • Quick target change • Slotted clamps and shields • Drop-down anode assembly • SAE and metric hardware options • Wordwide sales and technical support • 1 year warranty Options • Angular Flex Stem • Right Angle Stem • Deposition Chimney • Gas Ring • High Strength Magnets • Shutters • Cluster Assemblies

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TORUS® Linear Magnetrons-2

Kurt J. Lesker Company (KJLC) specifications and/or test data may not be copied, reproduced or referenced without express written permission of KJLC. Kurt I. Lesker^^^Ha^HCompany l Kurt J. Lesker Company United States 412.387.9200 800.245.1656 [email protected] Kurt ]. Lesker Canada Inc. Canada 416.588.2610 800.465.2476 [email protected] Kurt J. Lesker Company Ltd. Europe +44 (0) 1424 458100 s£[email protected] Kurt.Lesker (Shanghai) Trading Company (±«) Asia +86 21 50115900 [email protected]

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.