Super-SPECTROS 200 Organic Thin Film Deposition Systems

Product catalog summary

Overview: The Super SPECTROS® is an advanced system optimized for organic material deposition, suitable for applications in organic electronics, photovoltaics, OLED lighting, displays, integrated smart systems, metal cathode deposition, thin film batteries, and MEMS/NEMS.

Key Features:

Supports up to 12 LTE sources with capacities of 1cc, 10cc, or 35cc.
Host to dopant ratio of 100:0.1.
Includes up to 4 thermal evaporation sources and a substrate shutter.
Automatic substrate and mask storage and exchange capabilities.
Pyrometer port and glovebox interfaceable design with sliding front door and hinged rear door.
Controlled by KJLC eKlipse software with a rate control resolution of 0.05Å/s.
Recipe-based PC system controls and cryopump high vacuum pumping.

Options:

Co-deposition and electron beam source.
Twelve source thermal evaporation source array.
Caesium, Selenium, or HTE source options.
Load lock chamber and plasma clean.
3-position gate valve and in-situ source material replenishment.
Substrate rotation, heating, and cooling.
KJLC adaptor box and 2-port or 4-port glovebox.
Turbomolecular pumping and datalogging.

Specifications:

Process chamber made of UHV grade, 304 stainless steel, dimensions 24'' x 24'' x 40''.
Steel framework with enclosed panel base and open chamber access.
Brooks 1500 l/s cryo pump with oil-free backing pump, achieving 8x10-8 mbar base pressure.
VAT 2-position pneumatic HV valve, with optional 3-position valve.
Pressure measurement range from 10-1 to 10-10 mbar, displayed on system control panel.
Automatic vacuum interlocks and venting for process chamber.

Deposition and Control:

Low temperature source for controlled deposition up to 600°C.
Substrate platen supports up to 10'' diameter or 8'' x 8'' substrates, with heating up to 350°C and cooling to -10°C.
Film thickness and deposition rate controlled via system software.
System control through KJLC eKlipse software with optional recipe control and datalogging.

Power and Compliance:

Requires 400VAC, 3Ø, 32A, 50/60Hz, 5-wire (3Ph+N+E).
Compliance with CE, optional CSA and UL certifications.
12-month warranty with an option for an extended warranty at additional cost.

Catalog excerpts

Super-SPECTROS 200 Organic Thin Film Deposition Systems-1

Super SPECTROS Organic Material Deposition System Applications • Organic Electronics and Photovoltaics (OPV) • OLED Lighting and Displays • Integrated Smart Systems • Metal Cathode Deposition • Thin Film Batteries • MEMS/NEMS Features • Optimized for organic material deposition • Up to 12 LTE sources; 1cc, 10cc or 35cc capacity • Host to dopant ratio 100:0.1 • Up to 4 thermal evaporation sources • Substrate shutter • Automatic substrate, mask storage and exchange • Pyrometer port • Glovebox interfaceable design with sliding front door and hinged rear door • KJLC eKlipse control software • Rate control resolution 0.05Å/s • Recipe based PC based system controls • Cryopump high vacuum pumping • 2-position gate valve Options • • Co-deposition • Electron beam source • Twelve source thermal evaporation source array • Caesium, Selenium, or HTE source • Load lock chamber • Plasma clean • 3-position gate valve • In-situ source material replenishment • Substrate rotation, heating and cooling • KJLC adaptor box and 2-port or 4-port glov

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Super-SPECTROS 200 Organic Thin Film Deposition Systems-2

Process Chamber UHV grade, 304 stainless steel, nominally 24'' wide x 24'' deep by 40'' tall Steel construction, enclosed panel base with open chamber access, fully enclosed electronics cabinet Vacuum Pumping Brooks 1500 l/s cryo pump with oil-free backing pump standard (8x10-8 mbar base pressure) Vacuum Valves VAT 2-position pneumatic HV valve. Optional VAT 3-position pneumatic HV valve. All others are KJLC HV valves Pressure Measurement Oerlikon Leybold wide range (10-1 - 10-10 mbar), readout on system control panel Vacuum Interlocks and Venting Automatically sequenced vent control & vacuum...

Open the catalog to page 2