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Super-SPECTROS 200 Organic Thin Film Deposition Systems

Super-SPECTROS 200 Organic Thin Film Deposition Systems
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Super-SPECTROS 200 Organic Thin Film Deposition Systems - 1

Super SPECTROS Organic Material Deposition System Applications • Organic Electronics and Photovoltaics (OPV) • OLED Lighting and Displays • Integrated Smart Systems • Metal Cathode Deposition • Thin Film Batteries • MEMS/NEMS Features • Optimized for organic material deposition • Up to 12 LTE sources; 1cc, 10cc or 35cc capacity • Host to dopant ratio 100:0.1 • Up to 4 thermal evaporation sources • Substrate shutter • Automatic substrate, mask storage and exchange • Pyrometer port • Glovebox interfaceable design with sliding front door and hinged rear door • KJLC eKlipse control software • Rate control resolution 0.05Å/s • Recipe based PC based system controls • Cryopump high vacuum pumping • 2-position gate valve Options • • Co-deposition • Electron beam source • Twelve source thermal evaporation source array • Caesium, Selenium, or HTE source • Load lock chamber • Plasma clean • 3-position gate valve • In-situ source material replenishment • Substrate rotation, heating and cooling • KJLC adaptor box and 2-port or 4-port glov

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Super-SPECTROS 200 Organic Thin Film Deposition Systems - 2

Process Chamber UHV grade, 304 stainless steel, nominally 24'' wide x 24'' deep by 40'' tall Steel construction, enclosed panel base with open chamber access, fully enclosed electronics cabinet Vacuum Pumping Brooks 1500 l/s cryo pump with oil-free backing pump standard (8x10-8 mbar base pressure) Vacuum Valves VAT 2-position pneumatic HV valve. Optional VAT 3-position pneumatic HV valve. All others are KJLC HV valves Pressure Measurement Oerlikon Leybold wide range (10-1 - 10-10 mbar), readout on system control panel Vacuum Interlocks and Venting Automatically sequenced vent control &...

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