^^^^^^ms^^^m Company MAGNETICALLY LEVITATED MOLECULAR PUMP SHIMADZU MAGNETICALLY LEVITATED TURBO-MOLECULAR PUMP ©A full range of pumps available to suit your application ©Compact digitally controlled power supply ©Compatible with a variety of transmission protocols • Options: DeviceNet ©RoHS compliant

Features Measurement of ultimate pressure Variable pump rotational speed functionality Optimal exhaust performance can be selected for the process The pump's rotational speed can be set between 25 % and 100 %, to tune the pump exhaust performance. The chamber pressure can be tuned via the rotational speed settings. A maximum of 10 minutes is required to reach the set rotational speed. The conductance valves can also be cut if the pump is used under fixed conditions. Typical Ultimate Pressure of the TMP-1003LM Magnetically Levitated Turbo Molecular Pump 10-4 (36hours bake out) Exhaust Performance...

Tuning free Pump construction Gas flow Because of the compatibility of the turbo molecular pump with cable and power supply system combinations, retuning is unnecessary, even if the combination is changed. The cable length can be set between 3 m and 30 m. 30m 20m 15m 10m To backing vacuum pump Power supply High-frequency motor Radial magnetic bearing Axial magnetic bearing Rotor blades Touchdown bearings Cooling water pipe Stator blades Outlet flange Cable length Inlet flange Shared power supply Conceptual diagram of 5-axis magnetic bearings A 5-axis magnetic bearing system has been adopted....

Air Cooled Type Turbo Molecular Pump, Standard Specifications

Less than 0.012 µm (single amplitude) Less than 0.01 µm (single amplitude) Less than 0.01 µm (single amplitude) Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C 3 mT Retuning is unnecessary if the combination of pump with cable and power supply system is changed Operation: 0 ˚C to 45 ˚C / Storage: -25 ˚C to 70 ˚C (no condensation) Same as left Same as left

Wide-Range Turbo Molecular Pump Standard Specifications (Note 1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10~7 Pa (Note 2) When no protective net is used. If a protective net is used, the exhaust speed (N2) will be as follows: TMP-203: 180 Us; (Note 3) mL/min shows the volumetric flowrate at 0 °C and 1 atmosphere. (Equivalent to SCCM.) Power Supply EI-04 series

Water cooled Water cooled Water cooled Less than 0.012 µm (single amplitude) Less than 0.01 µm (single amplitude) Less than 0.01 µm (single amplitude) Dimensions of Power Supply

High Pumping Throughput Turbo Molecular Pump Standard Specifications

Photo of Turbo Molecular Pump Products Turbo Molecular Pump Models Integrated Production Factory for Turbo Molecular Pumps Kyoto

High Pumping Throughput Turbo Molecular Pump Standard Specifications

Water cooled Water cooled Same as left Same as left Less than 0.01 µm (single amplitude) Less than 0.01 µm (single amplitude) Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C Operation: 0 ˚C to 40 ˚C / Storage: -25 ˚C to 70 ˚C Same as left Same as left Same as left Same as left Same a

Dimensions and Pumping Performance TMP-203M and TMP-203MC Inlet Connector Gas purge port Outlet KF25 Unit: mm TMP-203LM and TMP-203LMC Inlet Connector Cooling water inlet joint Notes. Without a protective net. Backing Pump : 160L/min Notes. Without a protective net. Backing Pump : 160L/min mL/min

4-M10 depth 10 for fixing pump Cooling water inlet joint 2-RC1/4 4-M10 depth 10 for fixing pump Connector Notes. With a protective net. Backing Pump : 670L/min Notes. Without a protective net. Backing Pump : 670L/min mL/min : ga

Dimensions and Pumping Performance TMP-403M and TMP-403MC 4-M10 depth 10 for fixing pump Cooling water inlet joint 2-RC1/4 4-M10 depth 10 for fixing pump Connector Notes. With a protective net. Backing Pump : 670L/min Notes. Without a protective net. Backing Pump : 670L/min mL/min

Motor connector B (Same as the gas purge port) 4-M10 depth 15 for fixing pump Gas purge port Magnetic bearing connector B (Same as the gas purge port) Motor connector Magnetic bearing connector 4-M10 depth 15 for fixing pump Cooling water inlet/outlet port 2-RC1/4 Outlet KF40 Notes. Without a protective net. Backing Pump : 800L/min Notes. Without a protective net Backing Pump : 800L/min mL/min : gas throughp

Dimensions and Pumping Performance TMP-1003M and TMP-1003MC Motor connector B (Same as the gas purge port) 4-M10 depth 15 for fixing pump Gas purge port Magnetic bearing connector B (Same as the gas purge port) Motor connector Magnetic bearing connector Gas purge port 4-M10 depth 15 for fixing pump Cooling water inlet/outlet port 2-RC1/4 Outlet KF40 Notes. Without a protective net. Backing Pump : 800L/min Notes. With a protective net Backing Pump : 800L/min mL/min : gas th

TMP-1303LM (0) and TMP-1303LMC (0) For fixing pump 5-M12 depth 10 (Regular interval) B (Same as the gas purge port) Motor connector Magnetic bearing connector Cooling water inlet/outlet port 2-RC1/4 Notes. With a protective net. Inlet flange : VG200 Backing Pump : 1080L/min Notes. With a protective net Inlet flange : ISO200/VG200 Backing Pump : 7000L/min mL/min : gas throughput in 0 °C

Dimensions and Pumping Performance TMP-1503LM and TMP-1503LMC 5-M12 depth 10 (Regular interval) for fixing pump B (Same as the gas purge port) Motor connector Magnetic bearing connector Cooling water inlet/outlet port 2-RC1/4 Notes. With a protective net. Inlet flange : VG250 Backing Pump : 7000L/min Notes. With a protective net Inlet flange : VG250 Backing Pump : 7000L/min mL/min : gas throughput in 0

C1 (Cooling water inlet/outlet port) C2 (Cooling water inlet/outlet port) Motor connector Cooling water inlet/outlet port 2-RC1/4 Magnetic bearing connector Pump fixing tap B-M16 depth 20 102 Notes. With a protective net. Backing Pump : 7000L/min Notes. With a protective net. Backing Pump : 7000L/min mL/min : gas throughput in 0 °C