• Semi-standard applications include Semi E21-94, Semi E24-92, and Semi E21.1-1296.
• Features a patented L-motion link and dual shifts without springs in the actuator for faster, smoother actuation with reduced vibration.
• Includes a dust seal on the vacuum side of the bonnet flange to prevent particulate entry into the bellows.
• Mechanical locking ensures the valve locks into position at the end of gate travel.
• Welded bellows actuator seal and bonnet flange bolts with retainers to prevent bolt loss during disassembly.
• Double rectangular housing allows product entry on one side and exit on the other.
• Custom sizes and various o-ring compounds (Kalrez®, Chemraz®, etc.) are available.
• Applicable in plasma etch, CVD, sputter deposition, solar panel manufacturing, semiconductor processing, LCD/flat panel processes, and other cluster vacuum systems.

• Pressure range: 1 x 10^-9 mbar-ATM.
• Leak rate: body, seat <1 x 10^-9 mbar.l/s.
• Differential pressure on the gate: ≤ 1.2 bar in either direction.
• Materials: Valve body, bonnet seal, gate made of AL6061; welded bellows of AM350; valve actuator of SS 304, AL6061.
• Seal materials: VITON® (options include KALREZ, etc.).
• Temperature: Valve body up to 150°C, valve actuator up to 80°C.
• Operation: Double acting with a cycle until first service of ≥ 2 million.
• Position sensor (Open/Close): Micro switch Honeywell: 11SM-244-T, JS-5.

• Electrical connection: D-Sub 9P Male.
• Various o-ring specifications and dimensions provided for maintenance and assembly.
• Air tube connection: Ø6, Speed Controller.

Note: Kurt J. Lesker Company (KJLC) specifications and/or test data may not be copied, reproduced, or referenced without express written permission of KJLC.