Kurt I. Lesker Company (VACUUM MART DIVISION Applications • Plasma Etch, CVD, Sputter Deposition • Manufacturing of solar panels • Semiconductor processing • LCD/flat panel processes • All other cluster vacuum systems Features • Semi standard application (Semi E21-94, Semi E24-92, Semi E21.1-1296) • Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration • Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows • Mechanical locking so at the end of gate travel the valve locks into position • Welded bellows actuator seal • Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly • Double rectangular housing to allow product to enter one side and exit the other Options • Custom sizes available • Various o-ring compounds (Kalrez®, Chemraz®, etc.) www.lesker.com

Sealing Surface (Depth 0.05~0.1) : Bare Electrical Connection D-Sub 9P Male Bellows Bottom End AS-568A #123 17 806 788 351 (O-Ring Groove Center) 396 336 65 Housing Bottom : Bare O-Ring : AS-568A #274 O-Ring : AS-568A #375 Gland : Bare Air Tube Connection Ø6, Speed Controller Maintenance space more then 100 Dimensions Approximate Specifications Pressure range Leak rate: body, seat Differential pressure on the gate ≤ 1.2 bar in either direction Valve body, bonnet seal, gate Welded bellows Valve actuator Seal Materials Temperature VITON® (option KALREZ, ETC) Valve body Valve actuator Double acting...