Pumps
98Pages

Technical Notes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 to 4-7 Oil-Sealed Mechanical Pumps. . . . . . . . . . . . . . . . 4-8 to 4-39 Pump Selection Guide. . . . . . . . . . . . . . . . . . . . . . 4-8 to 4-12 Rotary Vane Pumps. . . . . . . . . . . . . . . . . . . . . . . 4-13 to 4-37 Rotary Piston Pumps. . . . . . . . . . . . . . . . . . . . . . 4-38 to 4-39 Dry Mechanical Pumps. . . . . . . . . . . . . . . . . . . . . 4-40 to 4-53 Pump Selection Guide. . . . . . . . . . . . . . . . . . . . . 4-40 to 4-41 Scroll Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-42 to 4-47 Rotary Piston Pumps. . . . . . . . . . . . . . . . . . . . . . 4-48 to 4-49 Diaphragm Pumps. . . . . . . . . . . . . . . . . . . . . . . . 4-50 to 4-51 Rotary Lobe Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-52 Screw Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-53 Turbomolecular Pumps . . . . . . . . . . . . . . . . . . . . 4-54 to 4-80 Pump Selection Guide. . . . . . . . . . . . . . . . . . . . . 4-54 to 4-59 Adixen™ (Alcatel®) . . . . . . . . . . . . . . . . . . . . . . . . 4-60 to 4-66 Turbo Single Stage Pumps . . . . . . . . . . . . . 4-60 to 4-61 Molecular Drag Pumps . . . . . . . . . . . . . . . . . . . . . . 4-62 Turbo-Drag Hybrid Pumps . . . . . . . . . . . . . 4-63 to 4-64 Magnetically Levitated Pumps . . . . . . . . . . 4-65 to 4-66 Edwards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-67 to 4-70 Turbo-Drag Hybrid Pumps . . . . . . . . . . . . . 4-67 to 4-68 Magnetically Levitated Pumps . . . . . . . . . . 4-69 to 4-70 Oerlikon Leybold . . . . . . . . . . . . . . . . . . . . . . . . . 4-71 to 4-74 Turbo Single-Stage Pumps. . . . . . . . . . . . . 4-71 to 4-72 Turbo-Drag Hybrid Pumps. . . . . . . . . . . . . . . . . . . . 4-73 Magnetically Levitated Pumps. . . . . . . . . . . . . . . . . 4-74 Pfeiffer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-75 to 4-77 Turbo-Drag Hybrid Pumps . . . . . . . . . . . . . 4-75 to 4-76 Magnetically Levitated Pumps. . . . . . . . . . . . . . . . . 4-77 Shimadzu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-78 to 4-79 Magnetically Levitated Pumps . . . . . . . . . . 4-78 to 4-79 Varian . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-80 Turbo-Drag Hybrid Pumps. . . . . . . . . . . . . . . . . . . . 4-80 Ion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-81 to 4-93 Pump Selection Guide. . . . . . . . . . . . . . . . . . . . . 4-81 to 4-82 KJLC® LION™ Series . . . . . . . . . . . . . . . . . . . . . . 4-83 to 4-89 KJLC® LION™ Series— Controllers and Accessories . . . . . . . . . . . . 4-90 to 4-93 Turbomolecular Pump Packages . . . . . . . . . . . . 4-94 to 4-96 Pump Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

Technical Notes ä Pump Classifications n Transfer vs. Capture Vacuum pumps are divided into two groups: gas transfer or gas capture. Transfer pumps force gas molecules in a preferred direction by positive displacement or momentum exchange. Ultimately, the gas is compressed until slightly above atmospheric pressure when it is ejected into the atmosphere. By contrast, capture pumps immobilize gas molecules on special surfaces within the vacuum system. To generalize their applications, transfer pumps are used for high gas loads while capture pumps produce oil-free vacuums and UHV pressures....

Technical Notes ➤ Pump Classifications ■ Normal vs. Corrosive Pumping aggressive gases can severely affect the pump’s lifetime depending on the construction of the pump’s critical internal components. Pump manufacturers offer chemical (a.k.a. corrosion or corrosive) versions of their pumps that feature some added degree of protection. Because there are no standards covering the chemical resistance of a pump, each pump manufacturer devises its own anti-corrosion strategies. ■ Rotary Vane Pumps Vacuum Level: Coarse Vacuum or Medium Vacuum (design dependent) Gas Removal Method: Gas Transfer...

Technical Notes ■ Reciprocating Piston Pumps Vacuum Level: Medium Vacuum A flexible metal or polymeric diaphragm seals a small volume at one end. At the other end are two spring-loaded valves, one opening when the volume’s pressure falls below the “outside” pressure, the other opening when the volume’s pressure exceeds the “outside” pressure. A cam on a motor shaft rapidly flexes the diaphragm, causing gas transfer in one valve and out the other. Gas Removal Method: Gas Transfer Vacuum Level: Medium Vacuum Gas Removal Method: Gas Transfer The mechanism, patented by CSIRO Australia, moves a...

Technical Notes ■ Roots (Rotary Lobe) Pumps Vacuum Level: Medium Vacuum Vacuum Level: Medium Vacuum Gas Removal Method: Gas Transfer Pump Design: Oil-Sealed (wet) ■ Hook and Claw Pumps Vacuum Level: Medium Vacuum Gas Removal Method: Gas Transfer Pump Design: Dry Two contra-rotating impellers, which in cross-sectional shape look like claws, mesh along their length without touching. The rotary action is not unlike the lobe pump but the claw pump’s inlet and outlet ports are in the casing’s end wall and are covered or exposed by the end of the impeller shaft. One advantage of this pump is its...

Technical Notes ■ Diffusion Pumps Vacuum Level: High Vacuum Gas Removal Method: Gas Transfer Pump Design: Oil-Sealed (wet) Diffusion pumps were the first high vacuum pumps in operation. Diffusion pumps operate by boiling a low vapor pressure, high molecular weight, non-reactive fluid and forcing a dense vapor stream up a central column and out as a conical vapor curtain, through jets that are angled downward. Gas molecules from the chamber randomly enter the curtain and are pushed toward the boiler by momentum transfer from the fluid molecules. When the vapor curtain reaches the cold wall,...

Technical Notes ■ Cryogenic Pumps Vacuum Level: High Vacuum & Ultra High Vacuum (design dependent) Gas Removal Method: Gas Capture Pump Design: Dry This mechanism is less susceptible to operational errors than other high vacuum pumps. If exposed to the chamber when the quantity of gas (Pressure x Volume) exceeds the manufacturer’s recommended number, the pump simply warms, temporarily losing its ability to pump. After the gas load is reduced and the pump cooled, it is again operational. The quantity of gas pumped before regeneration is needed varies from several hundred atm. liters for Ar...