Features:
The document outlines the features of a protection valve system designed for vacuum pump or chamber isolation in demanding processes. Key features include fast pneumatic actuation with closure in less than 0.3 seconds, a patented shielding mechanism to minimize particulate generation, a bellows-sealed actuator, and long cycle life under adverse conditions. The system offers low shock/motion during cycling, local/remote control with an LCD display, easy maintenance, and multiple channel control options.

Applications:
This valve system is suitable for various applications such as plasma etching, cleaning, desmearing, all CVD processes, sputter deposition, e-beam/thermal evaporation, and nanotechnology processes with high particulate levels. It is also applicable in thin film photovoltaic panel production.

Specifications:
The specifications include a pressure range from 1x10-7 mbar to 1 atm, a leak rate of less than 6x10-8 mbar.L/sec, and materials such as 304 SS for the body and 316L SS for the bellows. The actuator is made from Al-6061, and seals are made from Viton®. The system operates with air pressure between 60 – 100 PSI and can handle a differential pressure of 1 bar in either direction.

Global Vacuum Product Lines:
The document lists various product lines including vacuum valves and hardware, feedthroughs, vacuum pumps and accessories, vacuum fluids, pressure measurement tools, sample manipulation and motion equipment, and vacuum services. It also covers deposition materials, vacuum chambers and components, manufacturing and fabrication services, deposition sources, process instrumentation, system components, and custom engineered solutions.

Vacuum Systems:
The document mentions a range of vacuum systems such as thin film deposition systems, cluster tools, box coaters, PVD 75 PRO Line, LabLine, computerized systems, combinatorial systems, organic material deposition systems, R&D sputter tools, vacuum furnaces and ovens, atomic layer deposition (ALD), drum coaters, and in-line & linear systems.

Additional Information:
The document provides contact information for global representatives and mentions registered trademarks such as Fomblin®, Galden®, TORUS®, VAT®, and Pyrex®.