^^^^^^mS^^mm Company PROTECTION GATE VALVE SYSTEM JOLGY PHOTOVOLTAICS DISPLAY TECHNOLOGIES OLED/PLED NANOTECHNOLOGY AUTO LIGHTI EMS NIGHT VISION AEROSPACE SEMICONDUCTOR SUPERCONDUCTOR OPTICAL St WEB COATE DGERATION LASER TECHNOLOGY DATASTORAGE MASS SPECTROMETRY THIN FILM PHARMACEL MOTIVE LIGHTING SURFACE ANALYSIS R&D HIGH ENERGY PHYSICS HEAT TREATING NANOTECHh

Protect Your Investment ➤ New! Protection Valve System FEATURES For vacuum pump or chamber isolation in demanding processes: • Fast pneumatic actuation—closes in <0.3 seconds • Plasma etching, cleaning, and desmearing • Patented shielding mechanism for low particulate generation • Bellows-sealed actuator • Sputter deposition and e-beam/thermal evaporation • Long cycle life under adverse process conditions • Nanotechnology processes with high particulate levels • Low shock/motion during open/close cycling • Thin film photovoltaic panels • Local/remote control with status LCD display • Easy routine...

• Pressure Range: 1x107 mbar- 1 atm • Leak Rate: < 6x108 mbar.L/sec • Differential Pressure: Gate: 1 bar in either direction At opening: < 30mbar in either direction Seals: Viton® ^^^^■S^^l Company www.lesker.com 1.800.245.1656 [email protected]

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