www.uhvdesign.com Ktlft I. LeskCf ^^HS^H Company

UHV Motion and Heating Specialists UHV Design leads the field in high-technology UHV motion manipulation and heating product solutions for the vacuum industry. ROTARY DRIVES MagiDrive Rotary Feedthroughs Distributed exclusively in North America and China by the Kurt J. Lesker Company, UHV Design can provide both industry standard and custom solutions. Rotary Source Shutters, Viewport Shutters PUSH PULL DEVICES Magnetically Coupled Push Pulls, Linear Bellows Drives SAMPLE TRANSFER ARMS Unrivalled in-house resources WOBBLE STICKS Wobble Sticks Every stage of the production process is controlled...

ROTARY DRIVES Introduction to the MagiDrive Range Actuation Options SOLID MagiDrive Series MD10 Solid Range HOLLOW MagiDrive Series Introduction Motorisation Details MagiLift

Magnetic Rotary Drives The production-proven MagiDrive range of rotary feedthroughs enables rotation to be transferred into a vacuum system using a stiff high flux magnetic coupling. With no bellows, fluids or dynamic seals, the MagiDrive range offers reliable and leak-tight UHV operation. Using the latest magnetic materials technology, a large number of high flux magnetic fields interlock inner and outer rotating assemblies through a solid stainless steel enclosure. The enclosure or vacuum envelope is manufactured from one piece ensuring vacuum integrity. The high density of interlocking fields...

MAGIDRIVE Actuation options The MagiDrive range is available with a variety of manual, pneumatic and motorised actuation methods. Manual actuation Code Item Standard drive The standard manual drive. Friction control An adjustable external friction system enables the drive to hold its position when the desired position is reached. Resistance to turn is adjusted by tightening/ loosening a single screw located at the rear of the drive. Ideal for shutter applications. Motorised MagiDrives can be driven with DC or stepper motors, and are available with a selection of motor and gearbox combinations...

CF10, 1" OD Flange Solid MagiDrive Series Base Drive Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com 25.4 CF10 FLANGE WITH CLEAR HOLES This miniature drive is made possible through the use of the CF10 micro flange, which has an outside diameter of just 25.4mm. The body diameter is no bigger than the flange 1" OD, which makes the MD10 ideal for rotating small instrumentation loads, in applications where space is at a premium. »» High torque / size ratio »» Smallest UHV drive on market »» agnetically-coupled fail-safe design M »» No bellows...

CF16, 1.33" OD Flange Solid MagiDrive Series 34.0 CF16 FLANGE WITH CLEAR HOLES For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com 34.0 CF16 FLANGE WITH CLEAR HOLES »» agnetically-coupled fail-safe design M »» High torque / size ratio »» Zero backlash under low load »» No bellows or dynamic seals Specification Table Base Drive Dimensions (mm) MD16/MD19/MD16A Series The MD16 is the ‘work horse’ of the MagiDrive series. This standard drive provides sufficient torque for the majority of miniature feedthrough requirements. The MD19 variant maintains the same dimensions...

Base Drive Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com 68 70 CF35 FLANGE WITH CLEAR HOLES Solid MagiDrive Series MD20 & MD21 KEY ADVANTAGES »» agnetically-coupled fail-safe design M The MD20 provides sufficient torque for the majority of miniature feedthrough applications requiring a CF38 flange. The MD21 variant supplies higher torque with the same dimensions. »» High torque / size ratio »» No bellows or dynamic seals Torsional Stiffness »» Zero backlash under low load »» True UHV performance Specification Table MD20/MD21 Part Code...

Base Drive Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com 70 CF35 FLANGE WITH CLEAR HOLES Solid MagiDrive Series MD25 KEY ADVANTAGES »» agnetically-coupled fail-safe design M The MD25 provides a medium torque solution available on a CF35 flange. Available with manual, pneumatic and motorisation actuation options. »» High torque / size ratio »» No bellows or dynamic seals MD25 Part Code Generator »» Zero backlash under low load MagiDrive Size Actuation Options Manual Standard thimble Calibrated thimble + brake screw + home + limit switches...

Base Drive Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com 85.0 Solid MagiDrive Series 70 CF35 FLANGE WITH CLEAR HOLES The MD35 MagiDrive provides high torque rotation on a 70mm OD (2¾" OD CF) flange. The drive is ideally suited to applications such as the rotation of samples and small platens, where stability is key. The MD35 is also available in a hollow configuration (see page 22). For higher torque requirements on this flange size see MD35LB Series (6Nm) on page 24. MD35 KEY ADVANTAGES FLANGED DRIVE SHAFT WITH LOCATION SPIGOT »» agnetically-coupled...

Base Drive Dimensions (mm) For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com 133.5 Solid MagiDrive Series R114 CF64 FLANGE WITH CLEAR HOLES The MD64 MagiDrive provides high torque rotation through a high stiffness coupling. This drive would be ideally suited to robot type or platen rotation applications. The MD64 is also available in a hollow configuration (see page 26). For higher torque applications (up to 40Nm) see MD64LBM & MD100H on pages 28 and 30. »» agnetically-coupled fail-safe design M FLANGED DRIVE SHAFT WITH LOCATION SPIGOT »» High torque »» No...

Practical application of hollow MagiDrives on the EC-R Epicentre deposition stage. Schematic of stacked hollow range illustrating three concentric rotations. Hollow Magnetic Rotary Drives MD35LB hollow series MagiDrive provides polar rotation whilst allowing the MD35 shaft to be fed through to provide azimuthal rotation. The four largest MagiDrives are available in a hollow configuration, terminating with a non-rotating CF flange at the rear. This allows services to be passed through the drive or alternatively, an additional MagiDrive to be mounted to the rear, providing a secondary axis of rotation....