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WHF

WHF
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WHF

Product catalog summary

Overview

This document details the specifications, features, and ordering information for the WHA and WHF series wafer transfer hands designed for clean room environments. These devices are specialized for non-contact edge clamping of wafers, preventing damage to wafer surfaces during transfer.

Product Models and Types

  • WHA Series: Single-side driven edge clamp with side arm only.
  • WHF Series: Dual-side (synchronized) driven edge clamp using side arm and main fork.

Wafer sizes supported include 150AS (6 inches), 200AS (8 inches), 300AS (12 inches), and 450AS (18 inches).

Key Features

  • Fixed Transfer: Suitable for various handling positions and directions, minimizing misalignment during high-speed operations.
  • Non-Contact Clamping: Clamps only the wafer edges, avoiding contact with front and back surfaces to prevent pad scars.
  • Clean Room Compliance: Products are designed to meet clean room standards (FED Standard Class 1 with vacuum requirement).
  • Custom Manufacturing: Products can be tailored to customer specifications.

Operation Procedure

  1. The device receives the wafer with the holding base on the drive side open.
  2. The wafer is placed on the temporary holding base (available only for WHA-200AS-4 and HA-300AS-6 models).
  3. The wafer is clamped securely with the holding base on the drive side.

Specifications (Example: WHA-200AS-Z)

ParameterDetails
Transfer WorkpieceWafer
Workpiece Size200 mm diameter
Transfer MethodEdge Clamp
Transfer Quantity1 piece
Drive SystemSpring Clamp Method with Vacuum Pressure (-60 kPa to 95 kPa)
Total Jaw Stroke10 mm (Clamp 7 mm, Clamp Stock 3 mm)
Grip ForceApproximately 7 N
CleanlinessFED Standard Class 1 (Vacuum Required)
Fork MaterialCFRP (Carbon Fiber Reinforced Plastic)
Top, Temporary Holding Base, & Pad MaterialPEEK (Polyether Ether Ketone)
WeightApproximately 0.4 kg (200AS model)
OptionsOpen & Close Confirmation Sensor

Sensors and Configurations

Sensor types include non-contact 2-lead and 3-lead sensors in straight or L-shape configurations. Quantity options are one or two sensors depending on model and customer requirements.

Materials and Components

  • Fork and Side Fork: Made from CFRP for lightweight and strength.
  • Holder Components (A, B, C): Made from PEEK for durability and clean room compatibility.
  • Vacuum and Air Ports: Integrated into holders and forks for vacuum clamping and air supply.

Model Variants and Layouts

  • WHA-200AS, WHA-300AS, WHA-450AS: Single-side drive types with side arm only.
  • WHF-200AS, WHF-300AS: Dual-side drive types with side arm and main fork.

Layout drawings and CAD data are available for detailed design and integration (referenced pages 380P to 382P and 518P).

Limitations and Notes

  • Temporary holding base is only available for WHA-200AS-4 and HA-300AS-6 models.
  • Clean packaging is not available for these products.

Ordering Information

Ordering requires specifying wafer size, model type (WHA or WHF), sensor type and quantity, and any special customer requirements. Contact the manufacturer for custom specifications and additional support.

See more

Catalog excerpts

WHF-1

Wafer Transfer Hand WHA/WHF We design and manufacture products based on customer's specification. Edge clamping for non-contact on the front and back. Please contact us at any time. Key Features ■Fixed transfer  This product is applicable to numerous areas of application that requires various different  handling positions and directions, and which prevents misalignment caused by high-speed  operation ■No contact both on the front and back of the wafer  This model makes contact with the edges of the workpiece only in order to solve the  concern for pad scars caused by clamping and vacuum transfer. ■Clean room compliant types available ■WHA series  Single-Side Driven Edge Clamp with Side Arm ■WHF series  Dual-Side (Synchronized) Driven Edge Clamp via Side Arm & Main Fork Specification       Model Wafer dia.200 dia.300 dia.450 dia.200 dia.300 Edge Clamp 1 piece Closed Spring (Clamp Method) Drive System Open Vacuum Pressure -60KPa to 95KPa (Addition of Negative Pressure Cylinder) 10㎜ Total Jaw Stroke （Clamp 7㎜, Clamp Stock 3㎜） ２ ． to １． ４ Ｎ ９ Ｎ ２ ． to １． ４ Ｎ ９ Ｎ Approximately 7N Grip Force FED Standard Class 1 (Vacuum Required) Cleanliness ＣＲ ＦＰ Fork Material ＰＥ ＥＫ Top, Temporary Holding Base, & Pad Approximately 0.4kg Approximately 0.5kg Approximately 1.7kg Approximately 1.2kg Approximately 1.7kg Weight Open & Close Confirmation Sensor Option Transfer Workpiece Workpiece Size Transfer Method Transfer Quantity Clean packaging is not available Wafer Clamp Operation (Enlarged View) Temporary Holing Base* Drive Side Hold Base *WHA series (single-side driven type with side arm only) ①This device receives wafer with holding base on  the drive side open Drive Side Hold Base Clean Room & Special Type Fixed Side Base (Gripper End) ②Place wafer on temporary holding base.* 518P Clean Room & Special Type Temporary Holing Base* ③Clamp wafer with holding base at drive side Fixed Side Base (Gripper End) WHA-200AS-Z（Reference Chart） ■For dia.200 wafer ■Side arm only (one-side drive type) Fork Material Side Fork Material *Temporary holding base is WHA-200AS-4 and HA-300AS-6 only. Wafer Size Sensor, Quantity Special How To Order We design and manufacture products based on customer's specification. Model Symbol Name WHA Single Wafer Transfer Type Single-Side Driven Edge Clamp ＷＨ Single Wafer Transfer Type Dual-Side Driven Edge Clamp Ｆ Wafer size Symbol Name 150Ａ dia.150 / 6 inches Ｓ 200Ａ dia.200 / 8 inches Ｓ 300Ａ dia.300 / 12 inches Ｓ 450Ａ dia.450 / 18 inches Ｓ Sensor, Quantity Symbol Name ET3 Non-Contact 3-Lead Straight ET3L Non-Contact 3-Lead L-Shape ET2 Non-Contact 2-Lead Straight ET2L Non-Contact 2-Lead L-Shape S1 1 Sensor S2 2 Sensors For sen

 Open the catalog to page 1
WHF-2

Wafer Transfer Hand WHA/WHF We design and manufacture products based on customer's specification. Edge clamping for non-contact on the front and back. Please contact us at any time. Key Features ■Fixed transfer  This product is applicable to numerous areas of application that requires various different  handling positions and directions, and which prevents misalignment caused by high-speed  operation ■No contact both on the front and back of the wafer  This model makes contact with the edges of the workpiece only in order to solve the  concern for pad scars caused by clamping and vacuum transfer....

 Open the catalog to page 2
WHF-3

Wafer Transfer Hand WHA/WHF Layout Drawing WHA-300AS-Z（Reference Chart） ■For dia.300 wafer ■Side arm only (one-side drive type) ■For dia.200 wafer ■Side arm + main fork (dual-side drive type) Temporary Holder View Detail （3/1） （Total Stroke） Holder B Material PEEK Holder A Material PEEK Temporary Holder Holder A Enlarged View dia. Open & Close Confirmation Sensor Fiber Sensor Holder B Enlarged View Drive Port vacuum port Side Fork Material CFRP vacuum port vacuum port （Blank Plug on the opposite side） PEEK Material PEEK Material （Blank Plug on the opposite side） dia. through dia.9.5 counterbore...

 Open the catalog to page 3
WHF-4

Wafer Transfer Hand WHA/WHF Layout Drawing WHA-300AS-Z（Reference Chart） ■For dia.300 wafer ■Side arm only (one-side drive type) ■For dia.200 wafer ■Side arm + main fork (dual-side drive type) Temporary Holder View Detail （3/1） （Total Stroke） Holder B Material PEEK Holder A Material PEEK Temporary Holder Holder A Enlarged View dia. Open & Close Confirmation Sensor Fiber Sensor Holder B Enlarged View Drive Port vacuum port Side Fork Material CFRP vacuum port vacuum port （Blank Plug on the opposite side） PEEK Material PEEK Material （Blank Plug on the opposite side） dia. through dia.9.5 counterbore...

 Open the catalog to page 4

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.