WHF
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Wafer Transfer Hand WHA/WHF We design and manufacture products based on customer's specification. Edge clamping for non-contact on the front and back. Please contact us at any time. Key Features ■Fixed transfer  This product is applicable to numerous areas of application that requires various different  handling positions and directions, and which prevents misalignment caused by high-speed  operation ■No contact both on the front and back of the wafer  This model makes contact with the edges of the workpiece only in order to solve the  concern for pad scars caused by clamping and vacuum transfer. ■Clean room compliant types available ■WHA series  Single-Side Driven Edge Clamp with Side Arm ■WHF series  Dual-Side (Synchronized) Driven Edge Clamp via Side Arm & Main Fork Specification       Model Wafer dia.200 dia.300 dia.450 dia.200 dia.300 Edge Clamp 1 piece Closed Spring (Clamp Method) Drive System Open Vacuum Pressure -60KPa to 95KPa (Addition of Negative Pressure Cylinder) 10㎜ Total Jaw Stroke （Clamp 7㎜, Clamp Stock 3㎜） ２ ． to １． ４ Ｎ ９ Ｎ ２ ． to １． ４ Ｎ ９ Ｎ Approximately 7N Grip Force FED Standard Class 1 (Vacuum Required) Cleanliness ＣＲ ＦＰ Fork Material ＰＥ ＥＫ Top, Temporary Holding Base, & Pad Approximately 0.4kg Approximately 0.5kg Approximately 1.7kg Approximately 1.2kg Approximately 1.7kg Weight Open & Close Confirmation Sensor Option Transfer Workpiece Workpiece Size Transfer Method Transfer Quantity Clean packaging is not available Wafer Clamp Operation (Enlarged View) Temporary Holing Base* Drive Side Hold Base *WHA series (single-side driven type with side arm only) ①This device receives wafer with holding base on  the drive side open Drive Side Hold Base Clean Room & Special Type Fixed Side Base (Gripper End) ②Place wafer on temporary holding base.* 518P Clean Room & Special Type Temporary Holing Base* ③Clamp wafer with holding base at drive side Fixed Side Base (Gripper End) WHA-200AS-Z（Reference Chart） ■For dia.200 wafer ■Side arm only (one-side drive type) Fork Material Side Fork Material *Temporary holding base is WHA-200AS-4 and HA-300AS-6 only. Wafer Size Sensor, Quantity Special How To Order We design and manufacture products based on customer's specification. Model Symbol Name WHA Single Wafer Transfer Type Single-Side Driven Edge Clamp ＷＨ Single Wafer Transfer Type Dual-Side Driven Edge Clamp Ｆ Wafer size Symbol Name 150Ａ dia.150 / 6 inches Ｓ 200Ａ dia.200 / 8 inches Ｓ 300Ａ dia.300 / 12 inches Ｓ 450Ａ dia.450 / 18 inches Ｓ Sensor, Quantity Symbol Name ET3 Non-Contact 3-Lead Straight ET3L Non-Contact 3-Lead L-Shape ET2 Non-Contact 2-Lead Straight ET2L Non-Contact 2-Lead L-Shape S1 1 Sensor S2 2 Sensors For sen

Wafer Transfer Hand WHA/WHF We design and manufacture products based on customer's specification. Edge clamping for non-contact on the front and back. Please contact us at any time. Key Features ■Fixed transfer  This product is applicable to numerous areas of application that requires various different  handling positions and directions, and which prevents misalignment caused by high-speed  operation ■No contact both on the front and back of the wafer  This model makes contact with the edges of the workpiece only in order to solve the  concern for pad scars caused by clamping and vacuum...

Wafer Transfer Hand WHA/WHF Layout Drawing WHA-300AS-Z（Reference Chart） ■For dia.300 wafer ■Side arm only (one-side drive type) ■For dia.200 wafer ■Side arm + main fork (dual-side drive type) Temporary Holder View Detail （3/1） （Total Stroke） Holder B Material PEEK Holder A Material PEEK Temporary Holder Holder A Enlarged View dia. Open & Close Confirmation Sensor Fiber Sensor Holder B Enlarged View Drive Port vacuum port Side Fork Material CFRP vacuum port vacuum port （Blank Plug on the opposite side） PEEK Material PEEK Material （Blank Plug on the opposite side） dia. through dia.9.5...

Wafer Transfer Hand WHA/WHF Layout Drawing WHA-300AS-Z（Reference Chart） ■For dia.300 wafer ■Side arm only (one-side drive type) ■For dia.200 wafer ■Side arm + main fork (dual-side drive type) Temporary Holder View Detail （3/1） （Total Stroke） Holder B Material PEEK Holder A Material PEEK Temporary Holder Holder A Enlarged View dia. Open & Close Confirmation Sensor Fiber Sensor Holder B Enlarged View Drive Port vacuum port Side Fork Material CFRP vacuum port vacuum port （Blank Plug on the opposite side） PEEK Material PEEK Material （Blank Plug on the opposite side） dia. through dia.9.5...