KOFLOC MFM/MFC 5400

Product catalog summary

Overview: The Model 5400 Series Mass Flow Controller/Meter is designed for semiconductor process control, featuring a weldless structure, metal seals, and high accuracy with a response time of ≤1 second. It offers a significant price reduction and includes the Model 5410 Series with the same body design.

Key Features:

Temperature follow-up type current difference detection flow sensor for high accuracy and speed.
Normally closed solenoid valve.
Weldless construction and metal seals for low leakage.
Reduced dead volume due to diaphragm seat valve.
Compatible with other manufacturers' controllers.

Specifications:

Flow range: 10SCCM-20SLM (at N2 calibration conditions).
Valve type: Normally closed, Solenoid, Diaphragm seat valve.
Control range: 2%-100% F.S.
Response: 1 sec. or less to within ±2% of the set point.
Accuracy: Within ±1.0% F.S.
Linearity: Within ±0.5% F.S.
Repeatability: Within ±0.2% F.S.
Operating differential pressure: Varies with flow rates and gas types.
Proof pressure: 980kPa.
Leak rate: 1x10^-11 Pa·m³/s or less.
Working temperature range: 0-50°C (Accuracy guaranteed between 15-35°C).
Materials: SUS 316L body, Ni-Co diaphragm, PTFE valve seat, Ni and SUS 316L seals.
Electrical connections: Dsub 9-pin male connector per KFC standard.
Flow rate input/output signals: 0-5VDC.
Power supply: +15VDC (±5%) 100mA, –15VDC (±5%) 200mA for Model 5400; +15VDC (±5%) 100mA, –15VDC (±5%) 100mA for Model 5410.

Ordering Information: Options include Quick start (QS), Slow start (SL), and Low differential pressure specification (LP). Refer to the ordering section and illustrative examples for placing orders or requesting quotations.

KOFLOC MFM/MFC 5400

KOFLOC MFM/MFC 5400

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