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- KOFLOC MFC 3200
KOFLOC MFC 3200
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KOFLOC MFC 3200
Product catalog summary
Overview
The Model 3200 Series Mass Flow Controller is an advanced device designed as a successor to the 3910 Series. It is widely used in various applications such as semiconductor manufacturing, LCD production, combustion equipment, analytical devices, and biotechnology. The controller is noted for its high performance, aligning with the new standards set by KOFLOC.
The Model 3200 Series Mass Flow Controller is an advanced device designed as a successor to the 3910 Series. It is widely used in various applications such as semiconductor manufacturing, LCD production, combustion equipment, analytical devices, and biotechnology. The controller is noted for its high performance, aligning with the new standards set by KOFLOC.
Features
- Equipped with a temperature follow-up type current difference detection flow sensor for high accuracy and fast response.
- Incorporates a normally closed valve for safety.
- Capable of controlling various types of gases due to the CF switching feature.
- Reduced dead volume with a diaphragm seat valve.
- Control of small flow quantities up to 1 SCCM full scale (SR option).
- Low differential pressure type control available for combustible gases (LP option).
Specifications
- Flow range: 10 SCCM to 20 SLM (at N2 calibration conditions).
- Valve type: Normally closed, Solenoid, Diaphragm seat valve.
- Control range: 2% to 100% F.S.
- Response time: 1 second or less to within ±2% of full scale.
- Accuracy: Within ±1.0% F.S.
- Linearity: Within ±0.5% F.S.
- Repeatability: Within ±0.2% F.S.
- Operating differential pressure: 49kPa-294kPa for F.S. ≤ 5 SLM; 98kPa-294kPa for 5 < F.S. ≤ 20 SLM.
- Proof pressure: 980kPa.
- Leak rate: 1x10-8 Pa·m3/s or less.
- Working temperature range: 0-50°C (Accuracy guaranteed between 15-35°C).
- Materials: Body made of SUS 316L, Diaphragm of SUS 316, Valve seat of PTFE, Seals of Viton® (Optional: Neoprene® or NBR).
- Joint options: Standard 1/4SWL®, Optional 1/8SWL®, 1/4VCR®, Rc 1/4, etc.
- Electrical connections: Dsub 9-pin male connector per KFC standard (SEMI standard).
- Flow rate input/output signals: 0-5VDC.
- Required power supply: +15VDC (±5%) 100mA, –15VDC (±5%) 200mA.
Pin Assignment
The Dsub 9-pin connector follows the KFC standard. Notably, pin 4 (Power source COM) and pin 7 (Flow output COM) are internally connected, while pin 8 (Flow input Lo) is isolated. For single-ended connections, pin 8 should be connected to pin 4.
The Dsub 9-pin connector follows the KFC standard. Notably, pin 4 (Power source COM) and pin 7 (Flow output COM) are internally connected, while pin 8 (Flow input Lo) is isolated. For single-ended connections, pin 8 should be connected to pin 4.
Ordering Information
When placing an order or requesting a quotation, refer to the "Ordering" and "Illustrative Example" sections. Fill in the "Order/Quotation Request Card" and send it by fax.
When placing an order or requesting a quotation, refer to the "Ordering" and "Illustrative Example" sections. Fill in the "Order/Quotation Request Card" and send it by fax.
See more
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.