Candela CS20 Defect Detection
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Accelerating Yield OPTICAL SURFACE ANALYZER Advanced Inspection for Compound Semiconductor

OPTICAL SURFACE ANALYZER CANDELA® CS20 SERIES The KLA-Tencor Candela CS20 series optical surface analyzer (OSA) performs advanced surface inspection for semiconductor and optoelectronic materials. The CS20 series delivers process control and yield improvement for inspection of both opaque substrates such as Si, GaAs, and InP, as well as transparent materials such as SiC, GaN, sapphire, and glass. The CS20 series employs proprietary OSA technology to simultaneously measure scatter intensity, topographic variations, surface reflectivity and phase shift for automatic detection and...

OPTICAL SURFACE ANALYZER Candela OSA System Specular (Reflected Light) Scattered light Phase shift Polarizer S, P, or Q polarization mode Four signal detection channels enable a wide variety of inspection applications and defect classifications. Defect control and process uniformity are critical to process development and device yield enhancement. Contaminants such as particles and stains may alter film characteristics or cause adhesion problems for subsequent layers. Surface and subsurface defects such as pits, scratches, bumps, crystal defects or excessive surface roughness can impact...

Advanced 4-channel microscopy for defect analysis and identification of mission-critical Defects of Interest (DOI). Defects shown include: SiC triangle defect, sapphire substrate scratch, SiC polytype defect, wafer edge scratches, and GaN epi pit. Automatic Defect Classification software provides the most advanced recipe creation available for DOI classification. High-throughput scanning analysis delivers summary reports including defect maps, log files and automated pass/fail assignments. Defects are classified and binned by size into user-defined categories and displayed on the Candela...

High-Power RF Devices Particle The CS20 series are the most advanced tools on the market for detection and classification of critical GaAs defects — from epi defects such as pits, rings, and bullseyes to substrate level defects including crystal slip and polishing stains. The Candela OSA technology is extremely sensitive to GaAs substrate stains, many of which can go undetected under microscope or bright light inspection. Various stains have been identified as killer defects resulting in poor epi adhesion and rough epi morphology. Uncorrected stain defects are resulting in full wafer scraps...

KLA-TENCOR SERVICE and SUPPORT Customer service is an integral part of KLA-Tencor’s portfolio that enables our customers to accelerate yield. Our vast customer service organization collaborates with worldwide customers to achieve the required productivity and performance at the lowest overall cost. K-T Services includes comprehensive contracts, time and materials, spares, asset management, customer training, and yield consulting. OPTICAL SURFACE ANALYZER KLA-TENCOR CORPORATION One Technology Drive Milpitas, CA 95035 phone +1 408 875 3000 www.kla-tencor.com © 2010 KLA-Tencor Corporation....