Surfscan® SP3/Ax Unpatterned Wafer Inspection Systems The Surfscan SP3/Ax unpatterned wafer inspection systems The Surfscan SP3/Ax systems incorporate several capabilities offer a wide choice of options to 150mm, 200mm and 300mm that enhance a fab’s productivity and performance for the full IC fabs manufacturing ICs at design nodes from 500nm to 2Xnm. range of 500nm and smaller design node devices. These include With sensitivity enabled by a deep ultra-violet (DUV) laser source robust haze tolerance to extend the lifetime of test wafers, and high throughput, the Surfscan SP3/Ax system detect a wide integrated SURFmonitor™ for characterizing and measuring range of critical defects and surface quality issues at a low cost wafer surface quality, and connectivity to SurfServer® for of ownership, helping fabs improve chip reliability and achieve centralized recipe management and health monitoring of high yield. Built on the industry-proven Surfscan platform the Surfscan SP3/Ax inspectors offer production-proven performance and are easy to service, maintain and upgrade as a fab’s inspection requirements evolve. Defect Sensitivity Powerful DUV source, DUV-optimized optics and advanced algorithms deliver sensitivity to sub-40nm defects, Optional brightfield inspection channel detects large substrate defects, such as epi stacking faults, air pockets, Standard darkfield and optional brightfield inspection modes run concurrently, enabling capture and including latent defects that can impact IC reliability and other critical defects of interest (DOIs) classification of a wide range of yield-critical and latent defect types in a single test Signature Detection Automated defect signature detection and classification drives faster identification and sourcing of Integrated SURFmonitor enables process optimization and process tool qualification through the defect root causes characterization of surface quality, measurement of surface roughness, and capture of ultra-fine slip lines and scratches Production Integration Matching and correlation among Surfscan SP1, SP2, SP3, SP A2 and SP A3 models enhances fleet flexibility Surfscan SPA3 is field upgradeable to Surfscan SP3 delivering 26nm sensitivity and advanced inspection allowing fabs to mix-and-match tools based on their unique sensitivity requirements features, ensuring protecting a fab’s capital investment Flexible configurations support the specific performance requirements of different end-users Compatible with SurfServer for efficient fleet and recipe management Advanced stage, image computer and optics produce >100wph throughput for high sampling coverage, fast Robust haze tolerance reduces test wafer cost by extending test wafer life without sacrificing performance

Automotive IC Manufacturing Semiconductors are at the core of innovation in today’s automobiles. Many mission-critical vehicle functions – including basic operation, efficiency, safety, advanced driver assistance, infotainment, and autonomous driving – are controlled and monitored by numerous automotive chips. With thousands of ICs in a modern car, chip reliability has become the top quality concern for automakers. IC manufacturers are aggressively pursuing new strategies to improve chip reliability for the automotive industry. Chip reliability is highly correlated to random defectivity during...

Surfscan® SP3/Ax range Model Design Node Maximum Sensitivity Advanced Algos Applications Research & Development Supports characterization and qualification of new processes during the development phase of IC, With strong connectivity between the Surfscan SP3/Ax and KLA’s eDR7xxx™ e-beam review system, substrate and equipment manufacturing. development engineers have a robust solution for quickly finding, identifying and sourcing critical defects on new processes and materials. Incoming /Outgoing Wafer Qualification The extended DUV sensitivity of the Surfscan SP3/Ax helps wafer manufactures to...

Surfscan® Platform The industry-leading Surfscan® family of unpatterned wafer inspection systems identify defects and surface quality issues that affect the performance and reliability of semiconductor devices. Surfscan systems support 150mm, 200mm and 300mm IC, OEM, materials and substrate manufacturing for both leading-edge and larger design nodes. Using a DUV laser source with peak power control, a novel optical architecture, a range of spot sizes and advanced algorithms, the Surfscan family delivers ultimate sensitivity to critical defects and enhanced defect classification at high throughput...