P-7 Stylus Profiler
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Production Series P-7 Stylus Profiler The P-7 stylus profiler builds on the success of KLA-Tencor's market-leading stylus profilers for the semiconductor, data storage, MEMS, solar, opto-electronics and general purpose markets. This mid-range platform brings together all the superior scanning features associated with the KLA-Tencor brand — programmable scan stage, low noise, and high quality, high resolution long scans — with the best price-to-performance capabilities available from any manufacturer. The P-7 offers industry leading measurement repeatability for reliable measurement performance. The system has 150 mm scan length standard — the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a stylus profiler. Finally, the system includes point-and-click operation and the productvity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments. APPLICATIONS The P-7 Stylus profiler is capable of addressing a wide range of measurements and applications: ■ Thin film step heights ■ Thick film step heights ■ Photo resist / soft films ■ Etched trench depth ■ Materials characterization for surface roughness and waviness ■ Surface curvature and form ■ 2D stress of thin films ■ Dimensional analysis and surface texture ■ 3D imaging of various surfaces ■ Flatness or curvature ■ Defect review and defect analysis ■ And many more Amplitude parameters - Roughness profile Profile Extraction from Si Solar Substrate -Roughness Calculation

encor METROLOGY P-7 Stylus Profiler PRODUCT FEATURES AND OPTIONS The P-7 surface profiler features an unprecedented range of features and capabilities in a mid-range general purpose instrument. A variety of options are available to enhance the capabilities of the standard system. ■ Stylus Profiling The precision scan stage design enables high quality scans over the entire 150 mm sample stage area with up to 150 mm scan length and 1 mm Z range. This design ensures the highest quality 2D and 3D scans resulting in a higher level of metrology quality. ■ Step Height Repeatability A step height...