Production Series METROLOGY P-17 Stylus Profiler The P-17 is the 8th generation of the P-series stylus profiler, building on over 35 years of profilometry expertise. The system offers a programmable scan stage, low noise, and high-quality, high-resolution long scans enabling measurement of a variety of surfaces and applications. The P-17 offers industry leading measurement repeatability for reliable measurement performance. The system has 200 mm scan length standard — the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a stylus profiler. The P-17 includes many features to enhance the user experience such as top and side view optics, and motorized theta/leveling stages. Finally, the system includes point-and-click operation and the productvity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments. The P-17 OF (open frame) includes all of the capability of the P-17, but allows the user to load larger samples on the 9.5 by 9.5-inch square stage or 300 mm sample chuck. High Resolution 3D Scanning Capability Thin Film Step Height Measurement Capability APPLICATIONS Semiconductors CMP dishing, pattern-dependent erosion, surface topography characterization, and oxide planarity for greater device performance and yield loss reduction. Measures height, co-planarity and roughness of bumps for flip chip technology. Performs etch depth monitoring on open geometries with automated analysis and simple process set-ups. Data Storage Thin film head wafers and sliders, hard disks, optical and magnetic media. Wafer applications include plating thickness, coil heights, and CMP planarity. Slider applications include pole-tip recession analysis, air bearing cavities, and laser texture bump characterization that includes bump height, width, and depth analysis. MEMS and Opto-Electronics MEMS and opto-electronics step heights, micro-lens height and curvature, and DWDM etch depths. Other Applications Hybrid circuits and ceramic substrates, paper and foil finishes, polished and machined surfaces, coated or painted surfaces, and precision-machined surfaces of any kind. 3D Stress = Full Surface Stress Control

P-17 Stylus Profiler PRODUCT Features and Options Stylus Profiling The precision scan stage design enables high quality scans over the entire 200 mm sample stage area with up to 200 mm scan length and 1 mm Z range. This design ensures the highest quality 2D and 3D scans resulting in a higher level of metrology quality. Step Height Repeatability A step height repeatability of 4 Å, one-sigma or better on samples up to 1 µm tall offers the best measurement precision in the industry. This performance is ensured with ultra-low-noise electronics, and a low-mass, low-inertia capacitive sensor with sub-Angstrom...