MicroXAM-800 OPTICAL PROFILER Production Series – White Light Interferometer for 3D Measurement of Surface Topography

Overview The MicroXAM-800 is an optical surface profiler from KLA-Tencor’s surface metrology product line. This non-contact, white light interferometry system differentiates itself with an innovative yet simple user interface. It features a powerful suite of functions to support the broadest range of applications. The MicroXAM-800 is a flexible platform for both acquiring and analyzing data. The system includes the hardware and software features necessary to meet stringent R&D and production environment requirements. Features include programmable stages, simple recipe setup, scripting, and an...

Powerful New Software Platform The MicroXAM-800 features a new software platform with an innovative, yet simple interface. The software has been designed with ease of use in mind. SMART acquire is a simplified acquisition mode that makes intelligent control setting decisions based-on a single user input – the vertical scan range. The remaining scanning control adjustments follow automatically. This enables users to rapidly obtain good results with minimal training, improving time to results, and simplifying the user experience. ZSI acquire is a powerful acquisition mode that allows multiple surfaces...

Theory of Operation 3D optical profiling uses white light interferometry (WLI), to generate high-resolution height maps. This is also known as coherence scanning interferometry (CSI). The principle of operation is based on splitting a beam of incoherent light into two beams, redirecting one to reflect from a reference mirror, and the other to reflect from the sample surface. After reflecting, the beams travel to the CCD camera, where each pixel acts as an independent light detector. The light recombines coherently when the path distances for the two beams are matched. The resulting interference...