Accelerating Yield OPTICAL PROFILER Development Series

OPTICAL PROFILER OVERVIEW The MicroXAM-100 complements our surface profiling portfolio with a research grade, non-contact optical profiler. The MicroXAM-100 is a full-featured white light and phase-shifting interferometer that brings a powerful set of features and capabilities to the general research community. The system provides precise high-resolution, non-contact 3D profiles on both smooth and rough surfaces. The intuitive user interface allows for a fast learning curve ensuring quick and productive use of the tool in any environment. The MicroXAM -100 3D surface profiler and optical interferometer...

Measurement Principle Optical profiler light path Digital camera 3-D interferometric profiling splits a beam of light, reflecting it off both the test and reference surface. The light then recombines and interference patterns are detected by a high resolution camera. This information is then interpreted to provide height information on a pixel basis, building a highly resolved 3D representation of the surface. Software Features Single-user interface displays data acquisition controls and measurement results in a single window (see example). The software supports direct data export to common Windows...

OPTICAL PROFILER PRODUCT OPTIONS (continued) Laser scribe line on glass MicroXAM-100 used to measure the erosion of a motor sleeve assembly 294nm Crater Depth 3D View of Nanotechnology Sensor SIMS Crater with extracted profile and mean depth step height calculation KLA-TENCOR SERVICE and SUPPORT Customer service is an integral part of KLA-Tencor’s portfolio that enables our customers to accelerate yield. Our extensive customer service organization collaborates with customers worldwide through the life stages of their factory and tools to achieve the required productivity and performance at the...