1. Catalogs
  2. KLA Corporation
  3. Continuous StiffnessMeasurement
video corpo

Continuous StiffnessMeasurement

Continuous StiffnessMeasurement

Continuous StiffnessMeasurement

Product catalog summary
Overview
Nanoindenters are precision instruments used for nanoscale mechanical testing, capable of measuring Young’s modulus and hardness according to ISO 14577 standards. They operate over a wide range of deformation scales, from nanometers to millimeters, using electromagnetic actuation for high dynamic range in force and displacement.
Key Specifications
  • Frequency range: 0.001Hz to 120kHz
  • Load coupled frequency range: 0.001Hz to 1kHz
  • Voltage sensitivity: 2nV to 1V full scale
  • Typical operating frequency range: 1Hz to 300Hz
  • Load amplitudes: DCM max 0.9mN, DCM min 0.9nN, XP max 5.0mN, XP min 1.0nN
Quasi-Static and Dynamic Methods
Quasi-static indentation testing determines contact stiffness by analyzing the force vs. displacement curve during unloading. The Continuous Stiffness Measurement (CSM) technique allows for dynamic effects consideration, such as strain rate and frequency, and is compatible with XP and DCM II indentation heads.
Continuous Stiffness Measurement (CSM)
The CSM option separates in-phase and out-of-phase components of the load-displacement history, enabling accurate determination of initial surface contact and continuous measurement of contact stiffness. It is suitable for both stiff and compliant materials, providing full characterization of dynamic properties like strain rate sensitivity and complex modulus for viscoelastic materials.
Features and Benefits
  • Conformance to ISO 14577 standards
  • Dynamic properties characterization with nanometer precision
  • Compatibility with Nano Indenter XP and DCM heads
  • Accurate characterization of viscoelastic materials
  • Control of indentation tests with a constant strain rate
Applications
  • Semiconductors, thin films, MEMS
  • Hard coatings, diamond-like carbon films
  • Composite materials, fibers, polymers
  • Metals, ceramics
  • Biomaterials
KLA Support
KLA provides comprehensive support to maintain system productivity, including maintenance, supply chain management, cost reduction, and performance enhancements.
See more

Catalog excerpts

Continuous StiffnessMeasurement-1

Product Option for Nano Indenter ® G200 Continuous Stiffness Measurement (CSM) Overview and biomedical materials. The Nano Indenter G200 equipped Nanoindenters are accurate, flexible, user-friendly instruments with the CSM option can fully characterize dynamic properties for nanoscale mechanical testing. Electromagnetic actuation like strain rate sensitivity with nanometer precision. It can also allows Nanoindenters to achieve high dynamic range in force provide values such as complex (dynamic) modulus for and displacement. These instruments enable users to measure viscoelastic materials that exhibit a phase difference between Young’s modulus and hardness in compliance with ISO 14577 stress and strain. Indentation tests using the CSM option can standards and deformation over six orders of magnitude, from be controlled with a constant strain rate, a critical test mode for material systems such as pure metals or low melting point The accuracy and reliability of the results of nanoindentation testing depend on more than knowledge of the tip geometry and analysis of force vs. displacement curves. To accurately calculate mechanical property values, the contact area and stiffness of the contact between the indenter tip and the sample material must also be accurately determined. Nanoindenters from KLA characterize mechanical properties such as modulus of elasticity, loss factor, and fracture behavior with nanometerrange precision, using both quasi-static and dynamic depthsensing indentation methods. Quasi-Static and Dynamic Methods for alloys, polymer films and film/substrate systems. Features and Benefits ++ Accurate, repeatable results conforming to ISO 14577 standards ++ Dynamic properties characterization via continuous measurement of stiffness ++ Seamless compatibility with Nano Indenter XP and DCM indentation heads ++ Full characterization of dynamic properties with nanometer-range precision Nanomechanical Characterization ++ Accurate characterization of viscoelastic materials In conventional quasi-static indentation testing, contact ++ Ability to control indentation tests with a constant strain rate stiffness is determined by analyzing the force vs. displacement curve during unloading. This method provides a single result for a given indentation depth. The Continuous Stiffness Measurement (CSM) technique, compatible with both the XP Applications ++ Semiconductor, thin films, MEMS (wafer applications) and the DCM II indentation heads, satisfies application ++ Hard coatings, diamond-like carbon (DLC) films requirements that must take into account dynamic effects, ++ Composite materials, fibers, polymers such as strain rate and frequency. The CSM option offers a means of separating the in-phase and out-of-phase components of the load-displacement history. Phase separation enables accurate determination of the location of initial surface contact, and continuous measurement of contact stiffness as a function of depth or frequency, eliminating the need for unloading cycles. The CSM option is applicable for not only stiff materials such as metals, alloys and ceramics, but also for materials with compliant material properties, such as polymers, structural composites ++ Metals, ceramics ++ Biomaterials

 Open the catalog to page 1
Continuous StiffnessMeasurement-2

Product Option for Nano Indenter ® G200 Figure 1. (a) Schematic of free-hanging indenter (b) Dynamic model of instrument alone (no contact) (c) Dynamic system model during testing Figure 3. CSM characterization of modulus as a function of depth for thin fi lm applied to sample Figure 2. CSM can accurately characterize viscoelastic materials, reporting values such as storage modulus and tanδ Figure 5 (right). Accurate measurement of mechanical properties of Agarose is very important because it has been found that the storage modulus of these gels aff ect the form and function of the resulting cells....

 Open the catalog to page 2
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.