video corpo

8930

8930

Product catalog summary
Overview: The 8930 High Productivity Patterned Wafer Inspection System is designed to detect a wide range of critical defects in wide bandgap semiconductors like SiC and GaN, which are crucial for yield and reliability.
Benefits: The system offers high throughput and inline defect detection, enabling semiconductor and RF device manufacturers to quickly identify and resolve production issues. It supports high sampling strategies, monitoring up to 100% of dies on all wafers at critical process steps, ensuring removal of potentially failing dies before package-level testing or field use.
Technologies: The system features multi-mode LED scanning with high NA optics, high throughput operating modes, and transparent wafer handling for both patterned and unpatterned wafers. It utilizes DefectWise® DL-based defect discovery and binning technology, along with DesignWise® and FlexPoint™ precise area inspection technologies. Advanced algorithms for defect detection and noise suppression are also included.
Applications: The system is applicable in power semiconductor and RF device manufacturing, particularly for automotive, EV/HEV, and clean energy markets. It is effective for epi substrate quality control of SiC/GaN substrates and inline process and tool monitoring.
Markets: The primary markets include power semiconductor and RF devices, automotive and EV/HEV, and clean energy sectors.
Wafer Sizes: The system supports 300mm, 200mm, and 150mm wafer sizes.
Platform: The platform is customizable, extendible, and upgradeable, allowing for tailored configurations to meet specific production needs.
See more

Catalog excerpts

8930-1

Product Fact Sheet High productivity patterned wafer inspection system detects a wide variety of critical defects that affect the yield and reliability of wide bandgap (WBG) semiconductors, such as SiC and GaN The 8930 provides high throughput, inline defect detection and binning, helping power semiconductor and RF device makers:  Accurately identify and quickly resolve production process issues that can affect final chip yield and quality  Implement high sampling strategies by monitoring up to 100% of die on all wafers at critical process steps to remove die that may fail at package-level testing or in field use to automotive standards  Produce power application products on an extendible, cost-effective platform that provides the inspection sensitivity and AI technology needed to isolate critical defects and the throughput to support high sampling  Multi-mode LED scanning capability with high NA optics  High throughput operating modes  Transparent wafer handling; patterned and unpatterned wafer inspection  DefectWise® DL-based defect discovery and binning technology  DesignWise® and FlexPoint™ precise area inspection technologies  Advanced defect detection and noise suppression algorithms  Epi substrate quality control of SiC/GaN substrate defectivity  Inline process and tool monitoring with high sampling for reduced excursion risk  SiC critical detection of threading dislocations and reliability defects  Outgoing quality control of final patterned wafers Power Semiconductor and RF Devices Automotive and EV/HEV Clean Energy PLATFORM: MORE INFORMATION: WAFER SIZES:

 Open the catalog to page 1
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.