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2950 EP

2950 EP

Product catalog summary
Product Overview: The 2950 EP Broadband Plasma Optical Patterned Wafer Inspection System is designed to identify defects that impact the yield and reliability of memory chips. It is particularly beneficial for memory manufacturers working with advanced design node memory devices, including 3D NAND and DRAM.
Benefits: The system accelerates R&D and ramp cycle time by characterizing and optimizing new processes, design nodes, and devices. It aids in implementing defect reduction strategies to meet chip quality requirements and accelerates yield learning by providing accurate data on yield-critical defects. Additionally, it detects and characterizes defect issues at an optimal cost of ownership.
Technologies: The 2950 EP features a tunable DUV, UV, and visible broadband illumination source, selectable optical apertures, and a low-noise sensor. It includes the Super•Pixel™ inspection test mode for high throughput at sensitivity and advanced defect detection algorithms, such as MCAT. The iDO™ 3.0 employs advanced machine learning techniques for defect binning and nuisance suppression. Novel algorithms capture critical defects at the edges of memory cells and bin defects at critical memory process steps. Advanced Auto Focus capabilities ensure high sensitivity on tall 3D NAND memory stack applications. A warped wafer chuck is available as a billable option.
Applications: The system is used for defect discovery in R&D and ramp, characterization and debugging of defect issues, inline monitoring of critical layers requiring high sensitivity, and process window discovery and qualification.
Platform: The 2950 EP offers customizable configurations, is extendible and upgradeable, and supports 300mm wafers.
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Catalog excerpts

2950 EP-1

Product Fact Sheet Broadband plasma optical patterned wafer inspection system discovers defects that affect the yield and reliability of memory chips The 2950 EP provides high sensitivity discovery and binning of critical defects across a broad range of process layers, material types and process stacks. The 2950 EP helps memory manufacturers:  Accelerate R&D and ramp cycle time through characterization and optimization of new processes, design nodes and devices  Implement defect reduction strategies to meet chip quality requirements  Accelerate yield learning by providing accurate, actionable data on yield-critical defects  Detect and characterize defect issues at optimal cost of ownership  Tunable DUV, UV, visible broadband illumination source  Selectable optical apertures  Low-noise sensor  Super•Pixel™ inspection test mode for high throughput at sensitivity  Advanced defect detection algorithms, including MCAT  iDO™ 3.0 with advanced machine learning techniques for defect binning and nuisance suppression  Novel algorithms for capture of critical defects of interest at the edges of memory cells and for binning of defects at critical memory process steps  Advanced Auto Focus capabilities for high sensitivity on tall 3D NAND memory stack applications  Warped wafer chuck (billable option)  Defect discovery for R&D and ramp  Characterization and debug of defect issues  Inline monitoring of critical layers requiring high sensitivity  Process window discovery and qualification Chip manufacturing advanced design node memory devices, including 3D NAND and MORE INFORMATION:

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