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2935

2935

Product catalog summary
Overview: The 2935 Broadband Plasma Optical Patterned Wafer Inspection System is designed to identify defects that impact the yield and reliability of logic chips. It offers high sensitivity in detecting and categorizing critical defects across various process layers, materials, and stacks.
Benefits:
  • Accelerates R&D and production ramp-up by optimizing new processes, design nodes, and devices.
  • Facilitates defect reduction strategies to meet chip quality standards.
  • Enhances yield learning by providing precise, actionable data on yield-critical defects.
  • Offers cost-effective defect detection and characterization.
Technologies:
  • Tunable DUV, UV, and visible broadband illumination sources.
  • Selectable optical apertures and low-noise sensors.
  • Design-aware technologies such as pin•point™ and super•cell™.
  • Advanced defect detection algorithms and automated defect binning.
Applications:
  • Defect discovery for R&D and production ramp-up.
  • Characterization and debugging of defect issues.
  • Inline monitoring of critical layers requiring high sensitivity.
  • Process window discovery and qualification.
Market: The system is targeted at chip manufacturing, specifically for advanced design node logic devices.
Platform:
  • Customizable, extendible, and upgradeable configurations.
  • Supports 300mm wafers.
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Catalog excerpts

2935-1

Product Fact Sheet Broadband plasma optical patterned wafer inspection system discovers defects that affect the yield and reliability of logic chips The 2935 provides high sensitivity discovery and binning of critical defects across a broad range of process layers, material types and process stacks. The 2935 helps logic manufacturers:  Accelerate R&D and ramp cycle time through characterization and optimization of new processes, design nodes and devices  Implement defect reduction strategies to meet chip quality requirements  Accelerate yield learning by providing accurate, actionable data on yield-critical defects  Detect and characterize defect issues at optimal cost of ownership  Tunable DUV, UV, visible broadband illumination source  Selectable optical apertures  Low-noise sensor  Design-aware technologies, including pin•point™ and super•cell™  Advanced defect detection algorithms  Automated defect binning  Defect discovery for R&D and ramp  Characterization and debug of defect issues  Inline monitoring of critical layers requiring high sensitivity  Process window discovery and qualification Chip manufacturing advanced design node logic devices  Customizable configurations  Extendible  Upgradeable

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